Originally posted by pyrolytic at 2010-12-24 16:35:56:
如果想模拟化学气相沉积过程中的heterogeneous reaction， 用什么软件？化学气相沉积过程中温度较高，气相组分较复杂。

Originally posted by lishufei at 2010-12-24 17:12:26:

好像ms里有个模块可以模拟，你可以找找。