我最近也在了解这方面的问题，我做的是纳米线不过。下面是我做的一个方法的总结，不知道对你有没有帮助。
1）氧等离子体处理（清洗和产生羟基）或清洗后The NWs devices were then placed in the ozone/UV chamber for 3 minutes.
2) piranha solution（浓硫酸和30%双氧水 v/v3:1）浸泡5 min, 分别在 H2O 和acetone 超声20 min， 再用 5 M NaOH 室温处理5min ,水清洗，1% APTMS 水或醇溶液处理 10-15 min硅烷化修饰。
3）hydroxylated using a NaOH solution (4M in ethanol 95%) during 2 h.This treatment creates OH groups and eliminates organic contamination. The samples are placed for 12 h in a solution 0.5M of APTES in 95% ethanol. After two successive rinses with ethanol and deionised water to remove unbound silane,the samples are dried and heated for 3 h at 110 ◦C.
4）the SnO2 films were immersed in 1% ethanol solution of APTES for 3 min at room temperature,rinsed with ethanol for three times, then heated at 125 ◦C for 15 min
5) First, the samples were sonicated in 0.2%(v/v) soapy water at 60 ℃, thoroughly washed with triple distilled water (TDW), and then dipped in hot (90 ℃) piranha solution for 60 min (3:7 by volume of 30% H2O2 :H2SO4 Afterward, substrates were rinsed with TDW and further cleaned with H2O/H2O2/NH3 (5:1:0.25) solution while sonicating for 15 min at 60 ℃，
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俺们实验室是作自组装膜方面的，硅基底和石英玻璃方面的，和玻璃上的很相同。
基本方法和6楼同学形容的一样，但是我们导师认为120度的烘热，会使膜层受到破坏，反而不好。
俺想问下，ITO玻璃也可以硅烷化嘛？
可以，先用NaOH活化羟基，然后甲苯溶剂，室温两天。
这个NaOH，还有甲苯的浓度有什么要求不？用NaOH要浸泡多久之后转移到甲苯溶剂！谢谢指教！
我们实验室处理过石英片，玻璃的处理差不多。
1.首先活化玻璃片，用浓酸和双氧水（体积比7：3）煮一下，知道没有气泡冒出来，使玻璃片表面带上羟基
2.玻片用氮气吹干，放在一个容器中，然后用合适的硅烷化试剂（端基有带氨基，巯基，烷基链的）中进行硅烷化，就是滴一定量的硅烷化试剂进去
放在烘箱里120度加热3小时，然后再改为150度加热30min 自然冷却后就行了
我最近也在了解这方面的问题，我做的是纳米线不过。下面是我做的一个方法的总结，不知道对你有没有帮助。
1）氧等离子体处理（清洗和产生羟基）或清洗后The NWs devices were then placed in the ozone/UV chamber for 3 minutes.
2) piranha solution（浓硫酸和30%双氧水 v/v3:1）浸泡5 min, 分别在 H2O 和acetone 超声20 min， 再用 5 M NaOH 室温处理5min ,水清洗，1% APTMS 水或醇溶液处理 10-15 min硅烷化修饰。
3）hydroxylated using a NaOH solution (4M in ethanol 95%) during 2 h.This treatment creates OH groups and eliminates organic contamination. The samples are placed for 12 h in a solution 0.5M of APTES in 95% ethanol. After two successive rinses with ethanol and deionised water to remove unbound silane,the samples are dried and heated for 3 h at 110 ◦C.
4）the SnO2 films were immersed in 1% ethanol solution of APTES for 3 min at room temperature,rinsed with ethanol for three times, then heated at 125 ◦C for 15 min
5) First, the samples were sonicated in 0.2%(v/v) soapy water at 60 ℃, thoroughly washed with triple distilled water (TDW), and then dipped in hot (90 ℃) piranha solution for 60 min (3:7 by volume of 30% H2O2 :H2SO4 Afterward, substrates were rinsed with TDW and further cleaned with H2O/H2O2/NH3 (5:1:0.25) solution while sonicating for 15 min at 60 ℃，
兄弟们，你们用氮气吹干玻璃是怎么弄的？
不懂，那位能几句话扼要的说下，处理的目的吗？