²é¿´: 2510  |  »Ø¸´: 4
±¾Ìû²úÉú 1 ¸ö ²©Ñ§EPI £¬µã»÷ÕâÀï½øÐв鿴
µ±Ç°Ö»ÏÔʾÂú×ãÖ¸¶¨Ìõ¼þµÄ»ØÌû£¬µã»÷ÕâÀï²é¿´±¾»°ÌâµÄËùÓлØÌû

huibenben

½ð³æ (СÓÐÃûÆø)

[ÇóÖú] ÓÃPECVDºÍLPCVDÄÜÉú³¤µÄµª»¯¹èĤºñ·¶Î§

ÓÃPECVDºÍLPCVDÄÜÉú³¤µÄµª»¯¹èĤºñ·¶Î§

» ²ÂÄãϲ»¶

» ±¾Ö÷ÌâÏà¹Ø¼ÛÖµÌùÍÆ¼ö£¬¶ÔÄúͬÑùÓаïÖú:

khome1987
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

´óµ±¼Ò

Í­³æ (СÓÐÃûÆø)


xinmor: , ÇëÎð·¢¹ã¸æ¡£ 2012-06-06 20:37:35
²¬Ôù«Ë¾Ö÷Òª¸ºÔðPROTOFLEXÁ¿×ÓЧÂÊ¡¢IV²âÊÔ¼°Õæ¿Õ¶ÆÄ¤¡¢³Á»ý´¦Àíϵͳ¼°Ì«ÑôÄÜÖÐÊÔÏßµÈÈ«Ïß²úÆ·ÔÚÖйúÇøµÄ¶À¼ÒÏúÊÛ²¢ÊÛºó·þÎñÖ§³Ö
ÃÀ¹úProtoFlexÊÇÒ»¼ÒרעÓÚÉú²úÖÐСÐͱ¡Ä¤³Á»ýÉ豸¼°²âÁ¿É豸µÄÃÀ¹ú¹«Ë¾¡£Æä´´°ìÈ˼°¹«Ë¾¼¼Êõ×ܼàPawan Bhat²©Ê¿Óг¬¹ý25ÄêµÄ±¡Ä¤²âÊÔ¾­Ñ飬¿çÔ½Á˱¡Ä¤µç³Ø´æ´¢£¬¿ÉÔÙÉúÄÜԴϵͳ£¬¹â´æ´¢²ÄÁϺÍÕæ¿ÕÖÆ³ÌµÈÓ¦ÓÃ
¡¡¡¡ÃÀ¹úProtoFlex¹«Ë¾PECVD(µÈÀë×ÓÔöÇ¿»¯Ñ§ÆøÏà³Á»ý)ϵͳÄܹ»³Á»ý¸ßÖÊÁ¿SiO2¡¢Si3N4¡¢·Ç¾§¹è¡¢Ì¼»¯¹è¡¢Ì«ÑôÄܲÄÁÏ¡¢½ð¸Õʯ¡¢Àà½ð¸Õʯ±¡Ä¤¡¢Ó²Öʱ¡Ä¤¡¢¹âѧ±¡Ä¤µÈ¶àÖÖ±¡Ä¤²ÄÁÏÒÔ¼°Ì¿ÄÉÃ×¹Ü(CNT)µÈ¡£¿ÉÑ¡ÓÃÉ䯵(RF)¡¢¿ÕÒõ¼«¸ßÃܶȵÈÀë×ÓÌå(HCD)Ô´¡¢¸ÐÓ¦ñîºÏµÈÀë×ÓÌå(ICP)Ô´¡£¸Ã¹«Ë¾²ÉÓÃÏȽø¼¼ÊõºÍÎȶ¨¿É¿¿µÄÉè¼ÆÎªÄúÌṩ¶à·½Î»µÄ·þÎñ¡£
4Â¥2012-04-10 14:31:36
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
²é¿´È«²¿ 5 ¸ö»Ø´ð

liu2004m

ÈÙÓþ°æÖ÷ (ÎÄ̳¾«Ó¢)

ÓÅÐã°æÖ÷ÓÅÐã°æÖ÷ÓÅÐã°æÖ÷

¡¾´ð°¸¡¿Ó¦Öú»ØÌû

Õâ¸öÓ¦¸Ã´Ó¼¸¸önm¿ÉÒÔÒ»Ö±³¤µ½ÄãÐèÒªµÄºñ¶È°É£¬Ö»ÒªÄ㲻ͣ£¬Ä¤¾Í»áÒ»Ö±³¤°¡
2Â¥2012-03-13 14:52:57
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

zb19821212

Ìú¸Ëľ³æ (Ö°Òµ×÷¼Ò)

ÍÚ¾òîѰ׷Û....

¡¾´ð°¸¡¿Ó¦Öú»ØÌû

¡ï ¡ï ¡ï ¡ï ¡ï
huibenben(½ð±Ò+5, ²©Ñ§EPI+1): ¡ï¡ï¡ï¡ï¡ï×î¼Ñ´ð°¸, лл 2012-03-13 19:51:53
µª»¯¹è±¡Ä¤ºñ¶ÈÒ»°ãÔÚ1΢Ã×ÒÔÏ£¬ÔÙºñµÄ»°¾ÍûÓÐʲôӦÓüÛÖµÁË
3Â¥2012-03-13 17:21:12
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

´óË®±­

ľ³æ (ÖøÃûдÊÖ)

С³æ

ÔÚµª»¯¹èÉú³¤·½Ã棬LPCVDÓëPECVDÓкÎÇø±ð£¬ÈçÔÚ±¡Ä¤ÖÊÁ¿·½ÃæÀ´½²¡£ÎªºÎÔÚʪ·¨¿ÌÊ´ÖУ¬ÓÃ×÷±£»¤²ãµÄµª»¯¹è¶¼ÓÃLPCVDÉú³¤£¬¶ø²»ÓÃPECVD£¬ÓÃPECVDÉú³¤µÄµª»¯ÂÁÄܲ»Äܱ»ÓÃÀ´×ö±£»¤²ã£¿
^V^
5Â¥2012-06-06 14:14:52
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
×î¾ßÈËÆøÈÈÌûÍÆ¼ö [²é¿´È«²¿] ×÷Õß »Ø/¿´ ×îºó·¢±í
[»ù½ðÉêÇë] ±»ÎÒÑÔÖУºÐÂÄ£°å²»Ç¿µ÷¸ñʽÁË£¬¼Ùר¼Ò¿ªÊ¼¹Ü¸ñʽÁË +3 beefly 2026-03-14 3/150 2026-03-17 16:45 by RRRKKK
[¿¼ÑÐ] 332Çóµ÷¼Á +5 Zz°æ 2026-03-13 5/250 2026-03-17 11:01 by JineShine
[¿¼ÑÐ] ±¾ÈË¿¼085602 »¯Ñ§¹¤³Ì ר˶ +15 ²»ÖªµÀ½Ðʲô£¡ 2026-03-15 17/850 2026-03-17 10:13 by Sammy2
[¿¼ÑÐ] 302Çóµ÷¼Á +8 ¸ºÐÄÕßµ±Öï 2026-03-11 8/400 2026-03-17 09:05 by ŶŶ123
[¿¼ÑÐ] 286Çóµ÷¼Á +3 lemonzzn 2026-03-16 5/250 2026-03-16 20:43 by lemonzzn
[ÎÄѧ·¼²ÝÔ°] »ï°éÃÇ£¬×£ÎÒÉúÈÕ¿ìÀÖ°É +17 myrtle 2026-03-10 26/1300 2026-03-16 18:32 by Çà³ÈLn
[¿¼ÑÐ] 326Çóµ÷¼Á +4 ŵ±´¶û»¯Ñ§½±êéê 2026-03-15 7/350 2026-03-16 17:11 by ŵ±´¶û»¯Ñ§½±êéê
[¿¼ÑÐ] Ò»Ö¾Ô¸211 0703·½Ïò310·ÖÇóµ÷¼Á +3 ŬÁ¦·Ü¶·112 2026-03-15 3/150 2026-03-16 16:44 by houyaoxu
[¿¼ÑÐ] 0703»¯Ñ§µ÷¼Á£¬Çó¸÷λÀÏʦÊÕÁô +8 ÇïÓÐľ±± 2026-03-14 8/400 2026-03-16 15:21 by ŶŶ123
[¿¼ÑÐ] 080500£¬²ÄÁÏѧ˶302·ÖÇóµ÷¼ÁѧУ +4 ³õʶ¿ÉÀÖ 2026-03-14 5/250 2026-03-14 21:08 by peike
[¿¼ÑÐ] 265Çóµ÷¼Á +4 Íþ»¯±ý07 2026-03-12 4/200 2026-03-14 17:23 by userper
[»ù½ðÉêÇë] ÏÖÔÚÈçºÎ»Ø±ÜÈ¥ÄêµÄijһ¸öר¼Ò£¬²»ÖªµÀÃû×Ö +3 zk200107 2026-03-12 6/300 2026-03-14 17:13 by zk200107
[¿¼ÑÐ] ²ÄÁϹ¤³Ìµ÷¼Á +9 ßäßä¿Õ¿Õ 2026-03-12 9/450 2026-03-13 22:05 by ÐÇ¿ÕÐÇÔÂ
[¿¼ÑÐ] ¡¾¿¼Ñе÷¼ÁÇóÊÕÁô¡¿ +3 Ceciilia 2026-03-11 3/150 2026-03-13 20:18 by JourneyLucky
[¿¼ÑÐ] 307Çóµ÷¼Á +5 ³¬¼¶ÒÁ°º´óÍõ 2026-03-12 5/250 2026-03-13 15:56 by °ô°ôÇòÊÖ
[¿¼ÑÐ] 290Çóµ÷¼Á +7 ADT 2026-03-12 7/350 2026-03-13 15:17 by JourneyLucky
[¿¼ÑÐ] Çóµ÷¼Á +3 ³ÌÓ꺼 2026-03-12 3/150 2026-03-13 15:06 by JourneyLucky
[¿¼ÑÐ] 308Çóµ÷¼Á +3 ÊÇLupa°¡ 2026-03-12 3/150 2026-03-13 14:30 by Çóµ÷¼Ázz
[¿¼ÑÐ] 289Çóµ÷¼Á +3 ÀîÕþÓ¨ 2026-03-12 3/150 2026-03-13 11:02 by Çóµ÷¼Ázz
[¿¼ÑÐ] 290Çóµ÷¼Á +3 ADT 2026-03-13 3/150 2026-03-13 10:19 by peike
ÐÅÏ¢Ìáʾ
ÇëÌî´¦ÀíÒâ¼û