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From this table, it can be observed that all properties are affected by the variation
of O2/N2 flow ratios. Especially, when the oxygen flow rate was at 4 sccm (nitrogen flow rates18 sccm), the hardness and adhesion of Ti(C,N,O) coatings reached their maximum. Further increase in oxygen flow rate would decrease the values of both. From the chemical composition, it is worthy of noting that addition of oxygen enhanced the incorporation of nitrogen into the coatings. This is probably due to oxygen etching of the deposited carbon atoms.

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Especially, when the oxygen flow rate was at 4 sccm (nitrogen flow rate = 18 sccm), the hardness and adhesion of Ti(C, N, O) coatings reached their maximum.Further increase in oxygen flow rate would decreasethe values of both. Fig. 2 shows the variation of chemical composition with the change of gas flow ratios. It is worthy of noting that a small addition of oxygen will enhance the incorporation of nitrogen into the coatings significantly.This is probably due to the etching of the adsorbed oxygen atoms by carbon-based molecules.

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