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InsituEM

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[资源] 基于改装SEM的实时观测石墨烯CVD生长

传统SEM只限于高真空环境工作,环境SEM. 可在一定气氛下工作,但分辨率有所降低.马普－弗里茨哈勃研究所成功解决了热效应二次电子的滤过问题,实现了在高温状态下观测graphene CVD 生长.
与此graphene CVD生长细节首次实现了氢气气氛原位观测.(不同于LEEM, 高真空, 碳偏析)
Direct Observation of Graphene Growth and Associated Copper Substrate Dynamics by in Situ Scanning Electron Microscopy
ABSTRACT
This work highlights the importance of in situ experiments for an improved understanding of graphene growth on copper via metal-catalyzed chemical vapor deposition (CVD). Graphene growth inside the chamber of a modified environmental scanning electron microscope under relevant lowpressure CVD conditions allows visualizing structural dynamics of the active catalyst simultaneously with graphene nucleation and growth in an unparalleled way. It enables the observation of a complete CVD process from substrate annealing through graphene nucleation and growth and, finally, substrate cooling in real time and nanometer-scale resolution without the need of sample transfer. A strong dependence of surface dynamics such as sublimation and surface premelting on grain orientation is demonstrated, and the influence of substrate dynamics on graphene nucleation and growth is presented. Insights on the growth mechanism are provided by a simultaneous observation of the growth front propagation and nucleation rate. Furthermore, the role of trace amounts of oxygen during growth is discussed and related to grapheneinduced surface reconstructions during cooling. Above all, this work demonstrates the potential of the method for in situ studies of surface dynamics on active metal catalysts.

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附件 1 : Direct_Observation_of_Graphene_Growth_and_Associated_Copper.pdf

2015-04-20 19:31:03, 1.02 M