2楼: Originally posted by exciting73 at 2015-01-13 20:49:59
这是一种工艺条件吧，不是特指一种仪器

3楼: Originally posted by li19910228 at 2015-01-13 22:22:02
你清楚吗？这个我不很明白
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4楼: Originally posted by exciting73 at 2015-01-14 08:59:59
Bosch工艺交替刻蚀主要用于在Si片上形成高深宽比沟槽并具有垂直侧壁结构，是英国STS公司的专利技术。Bosch工艺主要存在的问题是刻蚀侧壁出现锯齿状表面，这对于微纳米细线条刻蚀是不希望出现的。
Bosch技术采用刻 ...

5楼: Originally posted by li19910228 at 2015-01-14 12:58:11
非常感谢
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6楼: Originally posted by exciting73 at 2015-01-14 13:46:04
别客气。请问你用什么胶做这个工艺？...

7楼: Originally posted by li19910228 at 2015-01-14 14:41:40
用Su8-2015，正胶不可行
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8楼: Originally posted by exciting73 at 2015-01-14 15:19:24
能否站内短消息留个联系方式...