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1¡£The structures of the AlN(1 nm)/MN(d nm)/AlN(1 nm) are sketched in Fig. 1 (a). Fig. 1 (b) shows the AR-H curves for the AlN(1 nm)/MN(d nm)/AlN(1 nm) films [d =5, 30, 80] before and after annealing at 400 ¡ãC. One can see the AR value drops from 1.0% for the as-deposited sample to about only 0.2% for the annealed one when d =5 nm. However, for d =30 nm, the AR value reaches about 3% for the annealed sample, which is very close to that of the sample in the as-grown state. In contrast, when d =80 nm, the AR value increases from 3.7% for the as-deposited sample to 4.7% for the annealed one, the value of which even exceeds the bulk value. As expected, Figure 1(c) shows the relationship between the AR and the MN thickness for the AlN/MN/AlN before and after annealing at 400 ¡ãC. It is noted that the AR values of the annealed samples are significantly lower than those of the as-grown ones when d < 30nm, whereas when the film thickness exceeds a critical thickness of 30nm, AR values of the annealed samples are significantly higher than those of the as-deposited samples. Apparently, AR change after annealing shows a significant thickness dependent behavior. ÎÄÖÐÓÐЩ½á¹¹±»Ìæ»»µôÁË£¬Çë¼ûÁ 2. the grain size changes little after annealing, so in this case, what causing the abnormal resistivity increase and the resulted AR reduction remains indefinitive. [ Last edited by ÄûÃÊÊ÷ on 2013-3-23 at 12:05 ] |
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hookhans
Ìú¸Ëľ³æ (ÖøÃûдÊÖ)
Farmer
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ÄûÃÊÊ÷: ½ð±Ò+30, ·ÒëEPI+1, ¡ï¡ï¡ï¡ï¡ï×î¼Ñ´ð°¸, ·Ç³£ÓÐÓà ·Ç³£¸Ðл°¡ 2013-03-23 16:30:52
ÄûÃÊÊ÷: ½ð±Ò+30, ·ÒëEPI+1, ¡ï¡ï¡ï¡ï¡ï×î¼Ñ´ð°¸, ·Ç³£ÓÐÓà ·Ç³£¸Ðл°¡ 2013-03-23 16:30:52
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1¡£The structures of the AlN(1 nm)/MN(d nm)/AlN(1 nm) and the AR-H curves of the AlN(1 nm)/MN(d nm)/AlN(1 nm) films [d =5, 30, 80] before and after annealing at 400 ¡ãC are shown in Fig. 1 (a) and Fig. 1 (b), respectively. It can be seen that the AR value drops from 1.0% to 0.2% after annealing the sample with d =5 nm. However, for the sample with d =30 nm, the AR value reaches about 3% after annealing, which is very close to that of the as-grown sample. In contrast, the AR value increases from 3.7% to 4.7% for the sample with d =80 nm after annealing, (the value of) which even exceeds the bulk value. Figure 1(c) shows the relationship between the AR and the MN thickness of the AlN/MN/AlN before and after annealing at 400 ¡ãC. It is noted that the AR values of the annealed samples are significantly lower than those of the as-grown ones when d < 30nm, whereas the AR values of the annealed samples are significantly higher than those of the as-deposited samples when the film thickness exceeds a critical thickness of 30nm. Apparently, AR change after annealing shows a significant thickness dependent behavior. 2. Since the grain size changes little after annealing, it still remains unclear exactly what causes the increase of the abnormal resistivity and the consequent AR reduction. |

3Â¥2013-03-23 16:16:15
bwshanxi
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