[资源]
【资源】气相沉积书籍——Handbook of Physical Vapor Deposition
HANDBOOK OF PHYSICAL VAPOR DEPOSITION (PVD) PROCESSING
Film Formation, Adhesion, Surface Preparation and Contamination Control
by
Donald M. Mattox
Society of Vacuum Coaters
Albuquerque, New Mexico http://ishare.iask.sina.com.cn/f/10077824.html