| 查看: 216 | 回复: 2 | |||
| 本帖产生 1 个 ，点击这里进行查看 | |||
[求助]
求助该文章的期刊号
|
|||
| 求助该文献的期刊号 |
回复此楼» 本帖附件资源列表
-
欢迎监督和反馈：小木虫仅提供交流平台，不对该内容负责。
本内容由用户自主发布，如果其内容涉及到知识产权问题，其责任在于用户本人，如对版权有异议，请联系邮箱：xiaomuchong@tal.com - 附件 1 : Mechanismofthede_省略_utBTAandoxidizer_栾晓东.pdf
2015-12-07 21:45:32, 531.44 K
» 猜你喜欢
计算机、0854电子信息（085401-058412）调剂
已经有4人回复
-
基金申报
已经有3人回复
-
国自然申请面上模板最新2026版出了吗？
已经有9人回复
-
溴的反应液脱色
已经有6人回复
-
纳米粒子粒径的测量
已经有7人回复
-
常年博士招收(双一流，工科)
已经有4人回复
-
推荐一本书
已经有10人回复
-
参与限项
已经有5人回复
-
有没有人能给点建议
已经有5人回复
-
假如你的研究生提出不合理要求
已经有12人回复
baiyuefei
版主 (文学泰斗)
风雪
- 应助: 4642 (副教授)
- 贵宾: 46.969
- 金币: 658150
- 散金: 11616
- 红花: 995
- 沙发: 81
- 帖子: 69385
- 在线: 13285.8小时
- 虫号: 676696
- 注册: 2008-12-18
- 性别: GG
- 专业: 合成药物化学
- 管辖: 有机交流
【答案】应助回帖
感谢参与，应助指数 +1
|
Accession number: 20152901037299 Title: Mechanism of the development of a weakly alkaline barrier slurry without BTA and oxidizer Authors: Luan, Xiaodong1 Email author luanyz1988@126.com; Liu, Yuling1; Niu, Xinhuan1; Wang, Juan1 Author affiliation: 1 Institute of Microelectronics, Hebei University of Technology, Tianjin, China Corresponding author: Luan, Xiaodong Source title: Journal of Semiconductors Abbreviated source title: J. Semicond. Volume: 36 Issue: 7 Issue date: July 1, 2015 Publication year: 2015 Article number: 076001 Language: English ISSN: 16744926 Document type: Journal article (JA) Publisher: Institute of Physics Publishing Abstract: Controllable removal rate selectivity with various films (Cu, Ta, SiO<inf>2</inf>  is a challenging job in barrier CMP. H<inf>2</inf>O<inf>2</inf> as an oxidizer and benzotriazole (BTA) as an inhibitor is considered to be an effective method in barrier CMP. Slurries that contain hydrogen peroxide have a very short shelf life because H<inf>2</inf>O<inf>2</inf> is unstable and easily decomposed. BTA can cause post-CMP challenges, such as organic residue, toxicity and particle adhesion. We have been engaged in studying a weakly alkaline barrier slurry without oxidizer and benzotriazole. Based on these works, the objective of this paper is to discuss the mechanism of the development of the barrier slurry without oxidizer and benzotriazole by studying the effects of the different components (containing colloidal silica, FA/O complexing agent, pH of polishing solution and guanidine nitrate) on removal rate selectivity. The possible related polishing mechanism has also been proposed. © 2015 Chinese Institute of Electronics.Number of references: 22 Main heading: Slurries Controlled terms: Alkalinity - Catalyst selectivity - Cleaning - Copper - Polishing Uncontrolled terms: Alkaline barrier slurries - Benzotriazole(BTA) - CMP - Colloidal silica - Complexing agents - Organic residues - Particle adhesion - Polishing mechanism Classification code: 524 Solid Fuels - 533 Ore Treatment and Metal Refining - 544.1 Copper - 604.2 Machining Operations - 801.1 Chemistry, General - 802.3 Chemical Operations - 803 Chemical Agents and Basic Industrial Chemicals - 804 Chemical Products Generally DOI: 10.1088/1674-4926/36/7/076001 Database: Compendex |
2楼2015-12-07 22:36:12
baiyuefei
版主 (文学泰斗)
风雪
- 应助: 4642 (副教授)
- 贵宾: 46.969
- 金币: 658150
- 散金: 11616
- 红花: 995
- 沙发: 81
- 帖子: 69385
- 在线: 13285.8小时
- 虫号: 676696
- 注册: 2008-12-18
- 性别: GG
- 专业: 合成药物化学
- 管辖: 有机交流
【答案】应助回帖
★ ★ ★ ★ ★
一点红: 金币+5, ★★★★★最佳答案 2015-12-08 09:03:21
心静_依然: LS-EPI+1, 感谢应助 2015-12-08 09:26:26
一点红: 金币+5, ★★★★★最佳答案 2015-12-08 09:03:21
心静_依然: LS-EPI+1, 感谢应助 2015-12-08 09:26:26
|
Accession number: 20152901037299 SCI未检索到，这是EI的结果 |
3楼2015-12-07 22:36:43