²é¿´: 7160  |  »Ø¸´: 8
µ±Ç°Ö»ÏÔʾÂú×ãÖ¸¶¨Ìõ¼þµÄ»ØÌû£¬µã»÷ÕâÀï²é¿´±¾»°ÌâµÄËùÓлØÌû

headwinds

гæ (³õÈëÎÄ̳)

[ÇóÖú] ÇëÎÊÂÛÎÄ״̬reviseÊÇ´óÐÞ»¹ÊÇСÐÞ°¡£¿ ÒÑÓÐ2È˲ÎÓë

½ñÌìÊÕµ½±à¼­²¿»Ø¸´£¬ÓиöÉó¸åÈ˱íʾThe English need to be revised. È»ºóϵͳÀïÊÇrevise£¬ÕâÊÇ´óÐÞ»¹ÊÇСÐÞ°¡£¿
ÁíÍâÎÒµÄÓ¢ÓïµÄÈ·²»ÔõôÑù£¬µ«ÊǵÄȷÿһ¾ä»°¶¼ÊÇÎÒдÇÒ¾­¹ýËûÈËÐ޸ĹýµÄ¡£Õâ¸öÇé¿öÓ¦¸ÃÕÒË­È¥ÈóÉ«±È½ÏºÃ°¡£¿
×îºó¸½ÉÏÓʼþÄÚÈÝ£¬±ÉÈËÐÂ×¢²á½ð±Ò²»¶à¡£¡£µ«»¹ÊÇÇë´óÉñÃǰïÎÒ¿´¿´£¬Ð»Ð»£¡

---------------------

The reviewers have commented on your above paper. They indicated that it is not acceptable for publication in its present form.

However, if you feel that you can suitably address the reviewers' comments (included below), I invite you to revise and resubmit your manuscript.

Please carefully address the issues raised in the comments.

If you are submitting a revised manuscript, please also:

a) outline each change made (point by point) as raised in the reviewer comments
   
AND/OR

b) provide a suitable rebuttal to each reviewer comment not addressed


To submit your revision, please do the following:

1. Go to: https://ees.elsevier.com/mssp/

2. Enter your login details

3. Click [Author Login]
This takes you to the Author Main Menu.

4. Click [Submissions Needing Revision]

NOTE: Upon submitting your revised manuscript, please upload the source files for your article. For additional details regarding acceptable file formats, please refer to the Guide for Authors at: https://www.elsevier.com/journals/materials-science-in-semiconductor-processing/1369-8001/guide-for-authors

When submitting your revised paper, we ask that you include the following items:

Manuscript and Figure Source Files (mandatory)

We cannot accommodate PDF manuscript files for production purposes. We also ask that when submitting your revision you follow the journal formatting guidelines.  Figures and tables may be embedded within the source file for the submission as long as they are of sufficient resolution for Production.For any figure that cannot be embedded within the source file (such as *.PSD Photoshop files), the original figure needs to be uploaded separately. Refer to the Guide for Authors for additional information.
https://www.elsevier.com/journals/materials-science-in-semiconductor-processing/1369-8001/guide-for-authors

Please note that this journal offers a new, free service called AudioSlides: brief, webcast-style presentations that are shown next to published articles on ScienceDirect (see also https://www.elsevier.com/audioslides). If your paper is accepted for publication, you will automatically receive an invitation to create an AudioSlides presentation.

The revised version of your submission is due by Aug 27, 2015.

I look forward to receiving your revised manuscript.

Yours sincerely,

Kuan Yew Cheong, PhD
Editor
Materials Science in Semiconductor Processing

Comments from the Editors and Reviewers (if available):


Reviewer #1: The English need to be revised.









******************************************
Please note that the editorial process varies considerably from journal to journal. To view a sample editorial process, please click here:
https://help.elsevier.com/app/answers/detail/p/7923/a_id/160
******************************************
For further assistance, please visit our customer support site at https://help.elsevier.com/app/answers/list/p/7923 Here you can search for solutions on a range of topics, find answers to frequently asked questions and learn more about EES via interactive tutorials. You will also find our 24/7 support contact details should you need any further assistance from one of our customer support representatives.
»Ø¸´´ËÂ¥

» ²ÂÄãϲ»¶

» ±¾Ö÷ÌâÏà¹Ø¼ÛÖµÌùÍÆ¼ö£¬¶ÔÄúͬÑùÓаïÖú:

ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

thanwen

½ð³æ (СÓÐÃûÆø)

¡¾´ð°¸¡¿Ó¦Öú»ØÌû

¸Ðл²ÎÓ룬ӦÖúÖ¸Êý +1
²»Òª¾À½áµ½µ×ÊÇ´óÐÞ»¹ÊÇСÐÞ¡£Ö»ÒªÊÇÐ޸ģ¬ÄÇôÈÏÕæ¸Ä¾ÍÄܽÓÊÕ£¬²»ÈÏÕæ¸Ä¾Í²»ÄܽÓÊÕ¡£¾ÍÕâô¼òµ¥£¬ºÃºÃ¸Ä¾ÍÍêÊÂÁË¡£
5Â¥2015-06-29 11:07:13
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
²é¿´È«²¿ 9 ¸ö»Ø´ð

yanglijing84

Ìú¸Ëľ³æ (Ö°Òµ×÷¼Ò)

¡¾´ð°¸¡¿Ó¦Öú»ØÌû

¡ï ¡ï ¡ï ¡ï ¡ï
¸Ðл²ÎÓ룬ӦÖúÖ¸Êý +1
headwinds(ÇïÌì°×ÔÆ´ú·¢): ½ð±Ò+1, ¸Ðл½»Á÷£¡ 2015-06-28 19:09:18
headwinds: ½ð±Ò+4, ¡ï¡ï¡ïºÜÓаïÖú 2015-06-29 11:54:56
ÓÐЩÔÓÖ¾ÊDz»ÏÔʾminor»òÕßmajor£¬¹Ø¼üÄã×Ô¼º¿´È˼ҵÄÒâ¼ûÐ޸ľͿÉÒÔÁË£¡ÓʼþÄÚÈÝÊÇÌ×»°£¬Ã»Ê²Ã´¿É¿´µÄ£¬¶¼Õâôд¡£¹Ø¼üÊÇ¿´ÄãµÄÉó¸åÈ˶¼Ôõô˵¡£Èç¹ûÒâ¼û¶à¶øÇÒÐèÒª²¹Êý¾ÝËã´óÐÞ¡£
whatever will be, will be.
2Â¥2015-06-28 16:29:00
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

headwinds

гæ (³õÈëÎÄ̳)

ÒýÓûØÌû:
2Â¥: Originally posted by yanglijing84 at 2015-06-28 16:29:00
ÓÐЩÔÓÖ¾ÊDz»ÏÔʾminor»òÕßmajor£¬¹Ø¼üÄã×Ô¼º¿´È˼ҵÄÒâ¼ûÐ޸ľͿÉÒÔÁË£¡ÓʼþÄÚÈÝÊÇÌ×»°£¬Ã»Ê²Ã´¿É¿´µÄ£¬¶¼Õâôд¡£¹Ø¼üÊÇ¿´ÄãµÄÉó¸åÈ˶¼Ôõô˵¡£Èç¹ûÒâ¼û¶à¶øÇÒÐèÒª²¹Êý¾ÝËã´óÐÞ¡£

лл»Ø¸´£¬ËûÖ»ÓÐÒ»¸öÉó¸åÈ˻ظ´£¬ËµÓ¢ÓïÐèÒªÐ޸쬾ÍÍêÁË¡£¡£
3Â¥2015-06-28 16:35:43
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

yanglijing84

Ìú¸Ëľ³æ (Ö°Òµ×÷¼Ò)

¡¾´ð°¸¡¿Ó¦Öú»ØÌû

ÒýÓûØÌû:
3Â¥: Originally posted by headwinds at 2015-06-28 16:35:43
лл»Ø¸´£¬ËûÖ»ÓÐÒ»¸öÉó¸åÈ˻ظ´£¬ËµÓ¢ÓïÐèÒªÐ޸쬾ÍÍêÁË¡£¡£...

Èç¹û±à¼­Ò²Ã»ÓиøÄãÆäËûÒâ¼ûµÄ»°£¬ÓÐÁ½ÖÖ¿ÉÄÜ£¬Ò»ÖÖ¾ÍÊÇÄãµÄÂÛÎĺܺã¬Ã»ÓÐɶÎÊÌ⣬ËùÒÔÈÃÄãÐ޸ĺÅÓïÑԾͺã¡ÁíÒ»ÖÖ¾ÍÊDZ༭¾õµÃÄãµÄÂÛÎIJ»´í£¬µ«ÊÇÉó¸åÈËÌá³öÄãµÄÓïÑÔÓÐÎÊÌ⣬±à¼­¿¼ÂÇÈÃÄã°ÑÓïÑÔÐ޸ĺÃÖ®ºó£¬ÔÙ¸øÄãÖØÐÂËÍÉó¡£×ÜÖ®£¬ÄܸøÄã·µÐ޵Ļú»á¾ÍÒѾ­Ô¤Ê¾×ű༭ÊÇ¿´ÖØÄãµÄÂÛÎĵģ¬Òª²»È»¿´µ½ÕâÖÖÒâ¼ûËû»áÖ±½Ó¾Ü¸ãµÄ¡£
whatever will be, will be.
4Â¥2015-06-28 17:48:58
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
×î¾ßÈËÆøÈÈÌûÍÆ¼ö [²é¿´È«²¿] ×÷Õß »Ø/¿´ ×îºó·¢±í
[»ù½ðÉêÇë] ±»ÎÒÑÔÖУºÐÂÄ£°å²»Ç¿µ÷¸ñʽÁË£¬¼Ùר¼Ò¿ªÊ¼¹Ü¸ñʽÁË +4 beefly 2026-03-14 4/200 2026-03-17 22:04 by »ÆÄñÓÚ·ÉChao
[¿¼ÑÐ] ¿¼ÑÐÇóµ÷¼Á +3 éÙËÌ. 2026-03-17 4/200 2026-03-17 21:43 by ÓÐÖ»ÀêÅ«
[¿¼ÑÐ] 344Çóµ÷¼Á +4 knight344 2026-03-16 4/200 2026-03-17 17:27 by ruiyingmiao
[¿¼ÑÐ] ¿¼Ñл¯Ñ§Ñ§Ë¶µ÷¼Á£¬Ò»Ö¾Ô¸985 +4 ÕÅvvvv 2026-03-15 6/300 2026-03-17 17:15 by ruiyingmiao
[¿¼ÑÐ] 332Çóµ÷¼Á +6 Zz°æ 2026-03-13 6/300 2026-03-17 17:03 by ruiyingmiao
[¿¼ÑÐ] Çóµ÷¼Á£¬×Ü·Ö315£¬¿¼µÄÉúÎïÒ½Ò©£¬Ò»Ö¾Ô¸ºþÄÏʦ·¶´óѧ¡£µ÷¼Áµ½ÈκÎרҵ¶¼¿ÉÒÔ +4 С¶¡Ïë½ø²½ 2026-03-11 5/250 2026-03-17 16:05 by ÍâÐÇÎÄÃ÷
[¿¼ÑÐ] 278Çóµ÷¼Á +3 Yy7400 2026-03-13 3/150 2026-03-17 08:24 by laoshidan
[¿¼ÑÐ] 11408 Ò»Ö¾Ô¸Î÷µç£¬277·ÖÇóµ÷¼Á +3 zhouzhen654 2026-03-16 3/150 2026-03-17 07:03 by laoshidan
[¿¼ÑÐ] ҩѧ383 Çóµ÷¼Á +3 ҩѧchy 2026-03-15 4/200 2026-03-16 20:51 by Ôª×Ó^0^
[¿¼ÑÐ] 326Çóµ÷¼Á +4 ŵ±´¶û»¯Ñ§½±êéê 2026-03-15 7/350 2026-03-16 17:11 by ŵ±´¶û»¯Ñ§½±êéê
[¿¼ÑÐ] 0703»¯Ñ§µ÷¼Á +6 ÄÝÄÝninicgb 2026-03-15 9/450 2026-03-16 16:40 by houyaoxu
[¿¼ÑÐ] 304Çóµ÷¼Á +3 ÂüÊâ2266 2026-03-14 3/150 2026-03-16 16:39 by houyaoxu
[¿¼ÑÐ] 297Ò»Ö¾Ô¸ÉϽ»085600Çóµ÷¼Á +5 Ö¸¼â°ËǧÀï 2026-03-14 5/250 2026-03-14 17:26 by a²»Ò×
[¿¼ÑÐ] 328Çóµ÷¼Á +3 5201314Lsy£¡ 2026-03-13 6/300 2026-03-14 15:31 by hyswxzs
[¿¼ÑÐ] ²ÄÁÏ080500µ÷¼ÁÇóÊÕÁô +3 Ò»¿Åmeteor 2026-03-13 3/150 2026-03-14 10:54 by peike
[¿¼ÑÐ] 266Çóµ÷¼Á +4 ѧԱ97LZgn 2026-03-13 4/200 2026-03-14 08:37 by zhukairuo
[¿¼ÑÐ] Çóµ÷¼Á +7 18880831720 2026-03-11 7/350 2026-03-13 16:10 by JourneyLucky
[¿¼ÑÐ] 308Çóµ÷¼Á +3 ÊÇLupa°¡ 2026-03-12 3/150 2026-03-13 14:30 by Çóµ÷¼Ázz
[¿¼ÑÐ] 277Çóµ÷¼Á +4 anchor17 2026-03-12 4/200 2026-03-13 11:15 by °×Ò¹ÓÆ³¤
[¿¼²©] ¸£ÖÝ´óѧÑî»ÆºÆ¿ÎÌâ×éÕÐÊÕ2026Äêרҵѧλ²©Ê¿Ñо¿Éú£¬2026.03.20½ØÖ¹ +3 Xiangyu_ou 2026-03-12 3/150 2026-03-13 09:36 by duanwu655
ÐÅÏ¢Ìáʾ
ÇëÌî´¦ÀíÒâ¼û