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[求助] 薄膜XRD术语问题请教~

今日看文献，有一段如下文字描述用XRD表征某薄膜材料：
The ﬁlms have been structurally characterized by triple-axis x-ray diffraction （XRD） analysis in terms of lattice-mismatch dependence and InN ﬁlm thickness dependence, and Hall measurements have been performed. In the XRD measurement, ω and ω–2θ scans were used, and the degree of tilting （the linewidth of x-ray signal, Δωc) [(0002)
reﬂection] and that of twisting (Δωa) [(10-10) reﬂection] have been separated. In addition, the degree of distribution of lattice constant c (Δ2θc) [(0002) reﬂection] of InN ﬁlms has been assessed.
哪位能简要帮忙翻译一下，最主要是解释一下Δωc、Δωa、Δ2θc到底表征什么？跟（002）面或（102）面的XRD 的ω扫描的半高宽有什么关系？还是半高宽的另一种表述？ “the degree of distribution of lattice constant c (Δ2θc)”这个东西我是完全不懂，麻烦帮忙解释一下~
拜谢！

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