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ÌâÄ¿£ºSurface Plasmon Interference Lithography Assisted by a Fabry¨CPerot Cavity Composed of Subwavelength Metal Grating and Thin Metal Film
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Surface Plasmon Interference Lithography Assisted by a Fabry-Perot Cavity Composed of Subwavelength Metal Grating and Thin Metal Film  

CHINESE PHYSICS LETTERS
¾í: 32
ÆÚ: 10
ÎÄÏ׺Å: 104206

DOI: 10.1088/0256-307X/32/10/104206

³ö°æÄê: OCT 2015


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A surface plasmon interference lithography assisted by a Fabry-Perot (F-P) cavity composed of subwavelength metal gratings and a thin metal film is proposed to fabricate high-quality nanopatterns. The calculated results indicate that uniform straight interference fringes with high contrast and high electric-field intensity are formed in the resist under the F-P cavity. The analyses of spatial frequency spectra illuminate the physical mechanism of the formation for the interference fringes. The influence of the F-P cavity spacing is discussed in detail. Moreover, the error analyses reveal that all parameters except the metal grating period in this scheme can bear large tolerances for the device fabrication.


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KeyWords Plus:NANOLITHOGRAPHY; MODES; BEAMS

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IOP PUBLISHING LTD, TEMPLE CIRCUS, TEMPLE WAY, BRISTOL BS1 6BE, ENGLAND


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Ñо¿·½Ïòhysics

Web of Science Àà±ðhysics, Multidisciplinary


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ÎÄÏ×ÀàÐÍ:Article

ÓïÖÖ:English

Èë²ØºÅ: WOS:000362944000014

ISSN: 0256-307X

eISSN: 1741-3540



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Impact Factor (Ó°ÏìÒò×Ó):  Journal Citation Reports®


  

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