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[×ÊÔ´] ·Ç¾§Ì¬Ì¼µÄÐÔÖÊ properties of amorphous carbon

·Ç¾§Ì¬Ì¼µÄÐÔÖÊ properties of amorphous carbon

E d i t e d b y S . R A V I P. S l L V A
U n i v e r s i t y o f S u r r e y , U K
2003: The Institution of Electrical Engineers

385P
Contents
Foreword .................................................................................................................... viii
Introduction ................................................................................................................. ix
Contributing Authors ................................................................................................... x
Abbreviations .............................................................................................................. xv
1. Microstructure, Hydrogen Content and Nitrogen Content ............................. 1
1.1 Microstructure of a-C ........................................................................................... 3
1.2 Hydrogen in a-C ................................................................................................... 13
1.3 Nitrogen in a-C ..................................................................................................... 21
1.4 Hydrogen in a-CN ................................................................................................ 27
1.5 Nitrogen in a-CN .................................................................................................. 31
2. Band Structure and Density of States ............................................................. 35
2.1 Structure of a-C through Simulation .................................................................... 37
2.2 Raman Spectroscopy of a-C ................................................................................ 46
2.3 Luminescence of Polymer-Like a-C:H ................................................................. 56
2.4 Conductivity and Photoconductivity of a-CN Films: ¦Òp/¦Òd = 5 x 106 ..................... 62
2.5 Photoconductivity of Carbon-Based Amorphous Thin Films ............................... 64
2.6 Application of Photoelectron Spectroscopy in the Analysis of a-C Films ............. 74
2.7 Electron Energy Loss Spectra of a-C (in STEM and TEM) .................................. 83
3. Defects ................................................................................................................ 91
3.1 Defects in a-C Films ............................................................................................ 93
3.2 Solid State Nuclear Magnetic Resonance Studies of a-C Thin Films .................. 103
4. Optical Properties .............................................................................................. 111
4.1 Optical Properties of a-C ..................................................................................... 113
4.2 Optical Energy Gap of a-CN ................................................................................ 122
4.3 Optical Properties of N-Doped Tetrahedral a-C Films ......................................... 125
4.4 IR Absorption Studies of a-C Thin Films .............................................................. 128
5. Mechanical, Thermal and Surface Properties ................................................. 135
5.1 Brillouin Spectroscopy of a-C Films ..................................................................... 137
5.2 Metal-Containing Tetrahedral a-C Nanocomposites ............................................ 146
5.3 Surface Energy of Tetrahedral a-C Nanocomposite ............................................ 148
5.4 Elastic Properties of Diamond-Like a-C Thin Films Determined by AFM ............ 151
5.5 Thermal Properties of a-C ................................................................................... 158
5.6 Friction in Diamond-Like a-C ............................................................................... 163
5.7 Hardness of a-C ................................................................................................... 168
5.8 STM and AFM of Surfaces of a-C ........................................................................ 171
5.9 X-Ray Reflectivity from a-C Films ........................................................................ 179
5.10 Carbon Nanocluster-Based Superhard Materials ................................................ 186
6. Conduction and Doping .................................................................................... 207
6.1 Conduction and Doping of a-C ............................................................................ 209
6.2 Electronic Properties of Tetrahedral a-C Films .................................................... 217
6.3 Conductivity and Doping of a-CN ........................................................................ 220
6.4 Doping of a-C with Nitrogen and Phosphorus ..................................................... 223
6.5 Doping of a-C and Hopping Transport ................................................................. 225
6.6 Electrical Properties of Metal-Containing a-C:H (Me-C:H) .................................. 229
7. Ion Implantation and Annealing ....................................................................... 233
7.1 Ion Implantation of a-C ........................................................................................ 235
7.2 Ion Implantation of Tetrahedral a-C ..................................................................... 244
7.3 Annealing of a-C .................................................................................................. 250
7.4 Ion Implantation and Annealing of a-CN .............................................................. 254
8. Interfaces, Multilayers and Superlattices ........................................................ 259
8.1 Properties of Interfaces to Polymer-Like a-C and Diamond-Like a-C Films ........ 261
8.2 Properties of Interfaces to Tetrahedral a-C Films and Doping Effects ................ 265
8.3 Properties of a-C Superlattices ............................................................................ 270
9. Films Growth ...................................................................................................... 277
9.1 Deposition Methods for a-C Layers ..................................................................... 279
9.2 Growth of Polymer-Like a-C Films ....................................................................... 285
9.3 Growth of a-C Films Using Energetic Species ..................................................... 291
10. Applications ....................................................................................................... 309
10.1 a-C Applications: Overview and Market Potential ................................................ 311
10.2 Field Emission Displays Using a-C ...................................................................... 313
10.3 Bistability in a-C for Memory and Antifuse Applications ...................................... 318
10.4 Hydrogenated and Fluorinated Diamond-Like a-C as the Interconnect
Dielectric for VLSI Chips ...................................................................................... 324
10.5 Data Storage Using a-C ....................................................................................... 329
10.6 Electrochemistry Applications of Tetrahedral a-C and Tetrahedral a-C:N
Films .................................................................................................................... 333
10.7 UV Detectors, Xerography and Heavy Particle Detectors Using a-C .................. 336
10.8 a-C Based MEMS ................................................................................................ 339
10.9 a-CN Films for ULSI ............................................................................................. 342
10.10 Hydrogenated a-C Optical Coatings .................................................................... 344
10.11 Medical Applications of a-C ................................................................................. 349
10.12 a-C Films for Electron Injection into Organic Light Emitting Diodes .................... 352
10.13 Solar Photovoltaic Application of Diamond-Like a-C ........................................... 355
Index .......................................................................................................................... 359·Ç¾§Ì¬Ì¼µÄÐÔÖÊ properties of amorphous carbon
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