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非晶态碳的性质 properties of amorphous carbon
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非晶态碳的性质 properties of amorphous carbon E d i t e d b y S . R A V I P. S l L V A U n i v e r s i t y o f S u r r e y , U K 2003: The Institution of Electrical Engineers 385P Contents Foreword .................................................................................................................... viii Introduction ................................................................................................................. ix Contributing Authors ................................................................................................... x Abbreviations .............................................................................................................. xv 1. Microstructure, Hydrogen Content and Nitrogen Content ............................. 1 1.1 Microstructure of a-C ........................................................................................... 3 1.2 Hydrogen in a-C ................................................................................................... 13 1.3 Nitrogen in a-C ..................................................................................................... 21 1.4 Hydrogen in a-CN ................................................................................................ 27 1.5 Nitrogen in a-CN .................................................................................................. 31 2. Band Structure and Density of States ............................................................. 35 2.1 Structure of a-C through Simulation .................................................................... 37 2.2 Raman Spectroscopy of a-C ................................................................................ 46 2.3 Luminescence of Polymer-Like a-C:H ................................................................. 56 2.4 Conductivity and Photoconductivity of a-CN Films: σp/σd = 5 x 106 ..................... 62 2.5 Photoconductivity of Carbon-Based Amorphous Thin Films ............................... 64 2.6 Application of Photoelectron Spectroscopy in the Analysis of a-C Films ............. 74 2.7 Electron Energy Loss Spectra of a-C (in STEM and TEM) .................................. 83 3. Defects ................................................................................................................ 91 3.1 Defects in a-C Films ............................................................................................ 93 3.2 Solid State Nuclear Magnetic Resonance Studies of a-C Thin Films .................. 103 4. Optical Properties .............................................................................................. 111 4.1 Optical Properties of a-C ..................................................................................... 113 4.2 Optical Energy Gap of a-CN ................................................................................ 122 4.3 Optical Properties of N-Doped Tetrahedral a-C Films ......................................... 125 4.4 IR Absorption Studies of a-C Thin Films .............................................................. 128 5. Mechanical, Thermal and Surface Properties ................................................. 135 5.1 Brillouin Spectroscopy of a-C Films ..................................................................... 137 5.2 Metal-Containing Tetrahedral a-C Nanocomposites ............................................ 146 5.3 Surface Energy of Tetrahedral a-C Nanocomposite ............................................ 148 5.4 Elastic Properties of Diamond-Like a-C Thin Films Determined by AFM ............ 151 5.5 Thermal Properties of a-C ................................................................................... 158 5.6 Friction in Diamond-Like a-C ............................................................................... 163 5.7 Hardness of a-C ................................................................................................... 168 5.8 STM and AFM of Surfaces of a-C ........................................................................ 171 5.9 X-Ray Reflectivity from a-C Films ........................................................................ 179 5.10 Carbon Nanocluster-Based Superhard Materials ................................................ 186 6. Conduction and Doping .................................................................................... 207 6.1 Conduction and Doping of a-C ............................................................................ 209 6.2 Electronic Properties of Tetrahedral a-C Films .................................................... 217 6.3 Conductivity and Doping of a-CN ........................................................................ 220 6.4 Doping of a-C with Nitrogen and Phosphorus ..................................................... 223 6.5 Doping of a-C and Hopping Transport ................................................................. 225 6.6 Electrical Properties of Metal-Containing a-C:H (Me-C:H) .................................. 229 7. Ion Implantation and Annealing ....................................................................... 233 7.1 Ion Implantation of a-C ........................................................................................ 235 7.2 Ion Implantation of Tetrahedral a-C ..................................................................... 244 7.3 Annealing of a-C .................................................................................................. 250 7.4 Ion Implantation and Annealing of a-CN .............................................................. 254 8. Interfaces, Multilayers and Superlattices ........................................................ 259 8.1 Properties of Interfaces to Polymer-Like a-C and Diamond-Like a-C Films ........ 261 8.2 Properties of Interfaces to Tetrahedral a-C Films and Doping Effects ................ 265 8.3 Properties of a-C Superlattices ............................................................................ 270 9. Films Growth ...................................................................................................... 277 9.1 Deposition Methods for a-C Layers ..................................................................... 279 9.2 Growth of Polymer-Like a-C Films ....................................................................... 285 9.3 Growth of a-C Films Using Energetic Species ..................................................... 291 10. Applications ....................................................................................................... 309 10.1 a-C Applications: Overview and Market Potential ................................................ 311 10.2 Field Emission Displays Using a-C ...................................................................... 313 10.3 Bistability in a-C for Memory and Antifuse Applications ...................................... 318 10.4 Hydrogenated and Fluorinated Diamond-Like a-C as the Interconnect Dielectric for VLSI Chips ...................................................................................... 324 10.5 Data Storage Using a-C ....................................................................................... 329 10.6 Electrochemistry Applications of Tetrahedral a-C and Tetrahedral a-C:N Films .................................................................................................................... 333 10.7 UV Detectors, Xerography and Heavy Particle Detectors Using a-C .................. 336 10.8 a-C Based MEMS ................................................................................................ 339 10.9 a-CN Films for ULSI ............................................................................................. 342 10.10 Hydrogenated a-C Optical Coatings .................................................................... 344 10.11 Medical Applications of a-C ................................................................................. 349 10.12 a-C Films for Electron Injection into Organic Light Emitting Diodes .................... 352 10.13 Solar Photovoltaic Application of Diamond-Like a-C ........................................... 355 Index .......................................................................................................................... 359  9780863417771.jpg |
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