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pcc2007

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guanyongc

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ElectroWang

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XPS is routinely used to determine:

what elements and the quantity of those elements that are present within ~10 nm of the sample surface
what contamination, if any, exists in the surface or the bulk of the sample
empirical formula of a material that is free of excessive surface contamination
the chemical state identification of one or more of the elements in the sample
the binding energy (BE) of one or more electronic states
the thickness of one or more thin layers (1¨C8 nm) of different materials within the top 10 nm of the surface
the density of electronic states
5Â¥2008-04-13 18:45:45
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ElectroWang

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Quantitative accuracy:
Quantitative accuracy depends on several parameters such as: S/N, peak intensity, accuracy of relative sensitivity factors, correction for electron transmission function, surface volume homogeneity, correction for energy dependency of electron mean free path, and degree of sample degradation due to analysis.
Under optimum conditions, the quantitative accuracy of the atom % values calculated from the Major XPS Peaks is 90-95% of the atom % values of each major peak. If a high level quality control protocol is used, the accuracy can be further improved.
Under routine work conditions, where the surface is a mixture of contamination and expected material, the accuracy ranges from 80-90% of the value reported in atom % values.
The quantitative accuracy for the weaker XPS signals, that have peak intensities 10-20% of the strongest signal, are 60-80% of the true value.
6Â¥2008-04-13 18:47:01
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ElectroWang

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Analysis times:

1¨C10 minutes for a survey scan that measures the amount of all elements, 1¨C10 minutes for high energy resolution scans that reveal chemical state differences, 1¨C4 hours for a depth profile that measures 4¨C5 elements as a function of etched depth (usual final depth is 1,000 nm)

[edit] Detection limits
0.1¨C1.0 atom % (0.1 atom% = 1 part per thousand = 1,000 ppm). Ultimate detection limit for most elements is approximately 100 ppm, which requires 8¨C16 hours.)
7Â¥2008-04-13 18:47:22
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zuozhijun5134

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yuncld

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