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ÊÇÕâ¸öÂ𣿠Accession number: 20132816496933 Title: Simulation of hollow cathode discharge by combining the fluid model with a transport model for metastable Ar atoms Authors: He, Shou-Jie1 ; Ha, Jing2; Liu, Zhi-Qiang1; Ouyang, Ji-Ting3; He, Feng3 Author affiliation: 1 College of Physics Science and Technology, Hebei University, Baoding 071002, China 2 Institute of Science, Hebei Agriculture University, Baoding 071001, China 3 School of Science, Beijing Institute of Technology, Beijing 100081, China Corresponding author: He, S.-J. (heshouj@hbu.edu.cn) Source title: Wuli Xuebao/Acta Physica Sinica Abbreviated source title: Wuli Xuebao Volume: 62 Issue: 11 Issue date: June 5, 2013 Publication year: 2013 Article number: 115203 Language: Chinese ISSN: 10003290 CODEN: WLHPAR Document type: Journal article (JA) Publisher: Institute of Physics, Chinese Academy of Sciences, P.O. Box 603, Beijing, 100190, China Abstract: The characteristics of rectangular hollow cathode discharge are studied based on a fluid model combined with a transport model for metastable Ar atoms in argon. The distribution of potential, density of electrons and ions, and the density of metastable atoms are calculated at a pressure of 10 Torr. The peak density of electron and ion is 4.7 ¡Á 1012 cm-3, and the peak density of metastable atoms is 2.1 ¡Á 1013 cm-3. Results obtained in terms of fluid-metastable hybrid model are compared with that in terms of the fluid model, which show that the electron produced by stepwise ionization is one of the important source of new electrons, and the metastable atoms have an obvious effect on the hollow cathode discharge. Compared with the results calculated in terms of fluid model, the density of electrons obtained in terms of hybrid model increases, and the depth of cathode sheath and the averaged electron energy decrease. © 2013 Chinese Physical Society. Number of references: 17 Main heading: Argon Controlled terms: Atoms - Cathodes - Electrons - Ionization - Models Uncontrolled terms: Cathode sheath - Density of electrons - Electron energies - Hollow cathode discharge - Hybrid model - Metastable atoms - Peak density - Transport models Classification code: 704.1 Electric Components - 802.2 Chemical Reactions - 804 Chemical Products Generally - 902.1 Engineering Graphics - 931.3 Atomic and Molecular Physics DOI: 10.7498/aps.62.115203 Database: Compendex Compilation and indexing terms, © 2012 Elsevier Inc |
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Simulation of hollow cathode discharge by combining the fluid model with a transport model for metastable Ar atoms He Shou-Jie1, Ha Jing2, Liu Zhi-Qiang1, Ouyang Ji-Ting3, He Feng3 1. College of Physics Science and Technology, Hebei University, Baoding 071002, China; 2. Institute of Science, Hebei Agriculture University, Baoding 071001, China; 3. School of Science, Beijing Institute of Technology, Beijing 100081, China http://wulixb.iphy.ac.cn/EN/Y2013/V62/I11/115203 ÔÚÕâ¸öÍøÒ³ÉÏ¿´µ½ÁË ÊÇÕâÑùÂð»¹ÊÇÈ¥±ðµÄµØ·½¼ìË÷ |

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