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Simulation of hollow cathode discharge by combining the fluid model with a transport model for metastable Ar atoms
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Simulation of hollow cathode discharge by combining the fluid model with a transport model for metastable Ar atoms

He Shou-Jie1, Ha Jing2, Liu Zhi-Qiang1, Ouyang Ji-Ting3, He Feng3
1. College of Physics Science and Technology, Hebei University, Baoding 071002, China;
2. Institute of Science, Hebei Agriculture University, Baoding 071001, China;
3. School of Science, Beijing Institute of Technology, Beijing 100081, China

http://wulixb.iphy.ac.cn/EN/Y2013/V62/I11/115203 ÔÚÕâ¸öÍøÒ³ÉÏ¿´µ½ÁË

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Accession number:  20132816496933

  Title:  Simulation of hollow cathode discharge by combining the fluid model with a transport model for metastable Ar atoms
  Authors:  He, Shou-Jie1 ; Ha, Jing2; Liu, Zhi-Qiang1; Ouyang, Ji-Ting3; He, Feng3  
  Author affiliation:  1 College of Physics Science and Technology, Hebei University, Baoding 071002, China  
   2 Institute of Science, Hebei Agriculture University, Baoding 071001, China  
   3 School of Science, Beijing Institute of Technology, Beijing 100081, China  
  Corresponding author:  He, S.-J. (heshouj@hbu.edu.cn)  
  Source title:  Wuli Xuebao/Acta Physica Sinica
  Abbreviated source title:  Wuli Xuebao
  Volume:  62
  Issue:  11
  Issue date:  June 5, 2013
  Publication year:  2013
  Article number:  115203
  Language:  Chinese
  ISSN:  10003290  
  CODEN:  WLHPAR  
  Document type:  Journal article (JA)
  Publisher:  Institute of Physics, Chinese Academy of Sciences, P.O. Box 603, Beijing, 100190, China
  Abstract:  The characteristics of rectangular hollow cathode discharge are studied based on a fluid model combined with a transport model for metastable Ar atoms in argon. The distribution of potential, density of electrons and ions, and the density of metastable atoms are calculated at a pressure of 10 Torr. The peak density of electron and ion is 4.7 ¡Á 1012 cm-3, and the peak density of metastable atoms is 2.1 ¡Á 1013 cm-3. Results obtained in terms of fluid-metastable hybrid model are compared with that in terms of the fluid model, which show that the electron produced by stepwise ionization is one of the important source of new electrons, and the metastable atoms have an obvious effect on the hollow cathode discharge. Compared with the results calculated in terms of fluid model, the density of electrons obtained in terms of hybrid model increases, and the depth of cathode sheath and the averaged electron energy decrease. © 2013 Chinese Physical Society.
  Number of references:  17
  Main heading:  Argon  
  Controlled terms:  Atoms  -  Cathodes  -  Electrons  -  Ionization  -  Models  
  Uncontrolled terms:  Cathode sheath  -  Density of electrons  -  Electron energies  -  Hollow cathode discharge  -  Hybrid model  -  Metastable atoms  -  Peak density  -  Transport models  
  Classification code:  704.1 Electric Components -  802.2 Chemical Reactions -  804 Chemical Products Generally -  902.1 Engineering Graphics -  931.3 Atomic and Molecular Physics
  DOI:  10.7498/aps.62.115203
  Database:  Compendex
   Compilation and indexing terms, © 2012 Elsevier Inc
3Â¥2013-08-05 09:44:20
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