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2013年新著——微/纳米机电系统与制造工艺的进展（英文版）
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"Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies" ed. by Kenichi Takahata InTeOpP | 2013 | ISBN: 9535110859 9789535110859 | 233 pages | PDF | 31 MB Reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research. In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others. Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials. Contents Preface Chapter 1 Flexible Circuit Technologies for Biomedical Applications Chapter 2 Liquid Encapsulation Technology for Microelectromechanical Systems Chapter 3 Electroporation Based Drug Delivery and Its Applications Chapter 4 Optical MEMS for Telecommunications: Some Reliability Issues Chapter 5 CMOS Compatible Bulk Micromachining Chapter 6 Laser Micromachining for Gallium Nitride Based Light-Emitting Diodes Chapter 7 Mechanics of Nanoelectromechanical Systems: Bridging the Gap Between Experiment and Theory Chapter 8 Nanolithography Chapter 9 Nanotechnology for Packaging  InTeOpP | 2013 | ISBN: 9535110859 9789535110859 | 233 pages | PDF | 31 MB [ Last edited by Pureland on 2013-5-29 at 18:01 ] |
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4110wu3楼
2013-05-29 18:01
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五星好评 顶一下，感谢分享！
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