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1. ½éÉÜ´«Í³ÆÂĪºÏ½ðAMRÑо¿½øÕ¹Ö®Ç°£¬ÏÈÀ´Ã÷È·AMR´«¸ÐÆ÷ÐèÒªÓÅ»¯µÄÖ¸±ê¼°ÆäÖ®¼ä¹ØÏµ¡£ Before introducing the recent advances of traditional AMR films, it is necessary to clarify the parameters to be optimized for AMR sensors and their relations. 2. 2.ÐÂÒ»´ú¸ßÁéÃô¶È´«¸ÐÆ÷ÐèÒª²ÄÁϸߵĴų¡ÁéÃô¶È£¨Sv£©ºÍÐÅÔë±È£¨»ò³ÆµÍÔëÒô£©£¬¶ø¸ßµÄSvÊÇÐèÒªÊ×ÏÈ»ñµÃµÄ¹Ø¼üÖ¸±ê¡£ The new generation of high-sensitivity sensors requires materials with high magnetic field sensitivity (Sv) and signal-to-noise ratio (or low noise), where high Sv is the prior key parameter to be obtained. 3.ͨ³££¬²ÄÁϵÄ΢½á¹¹Ó°Ïìן÷ÏòÒìÐԴŵç×èЧӦ£¬Õâ°üÀ¨²ÄÁϵijɷ֣¬±¡Ä¤ºñ¶È£¬¾§Á£³ß´ç£¬ÄÚÓ¦Á¦£¬Ö¯¹¹£¬ÔÓÖÊÔ×Ó£¬ÖÖ×Ó²ãµÈ£¬¶øÕâЩ΢½á¹¹Êܵ½¹¤ÒÕÌõ¼þµÄÓ°Ï죬È磺³Á»ý¹ý³ÌÖлùƬµÄζȣ¬Íâ¼Ó´Å³¡£¬³Á»ýËÙÂÊ£¬±¾µ×Õæ¿ÕºÍ¹¤×÷ÆøÑ¹£¬ÒÔ¼°ÈÈ´¦ÀíµÈ¡£ In general, the AMR value is affected by micro-structure of the material, including the composition of the material, film thickness, grain size, internal stress, texture, impurity atoms, and seed layer. And these micro-structures are under the influence of process conditions such as substrate temperature during deposition, external magnetic field, deposition rate, base and working pressure, and heat treatment. |

2Â¥2013-04-16 22:44:17
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ÄûÃÊÊ÷: ½ð±Ò+8, ·ÒëEPI+1, ¡ï¡ï¡ï¡ï¡ï×î¼Ñ´ð°¸, ºÜºÃ°¡ 2013-04-17 11:28:23
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Ref: 1.½éÉÜ´«Í³ÆÂĪºÏ½ðAMRÑо¿½øÕ¹Ö®Ç°£¬ÏÈÀ´Ã÷È·AMR´«¸ÐÆ÷ÐèÒªÓÅ»¯µÄÖ¸±ê¼°ÆäÖ®¼ä¹ØÏµ¡£ Before introducing the research progress of the traditional AMR films, it is necessary to define the relationships between the parameters that need to be optimized in AMR sensors. 2.ÐÂÒ»´ú¸ßÁéÃô¶È´«¸ÐÆ÷ÐèÒª²ÄÁϸߵĴų¡ÁéÃô¶È£¨Sv£©ºÍÐÅÔë±È£¨»ò³ÆµÍÔëÒô£©£¬¶ø¸ßµÄSvÊÇÐèÒªÊ×ÏÈ»ñµÃµÄ¹Ø¼üÖ¸±ê¡£ The new generation of high-sensitivity sensors should have high magnetic field sensitivity (Sv) and signal-to-noise ratio (low noise level), whereas the former is the key parameter for evaluating the AMR sensor. 3.ͨ³££¬²ÄÁϵÄ΢½á¹¹Ó°Ïìן÷ÏòÒìÐԴŵç×èЧӦ£¬Õâ°üÀ¨²ÄÁϵijɷ֣¬±¡Ä¤ºñ¶È£¬¾§Á£³ß´ç£¬ÄÚÓ¦Á¦£¬Ö¯¹¹£¬ÔÓÖÊÔ×Ó£¬ÖÖ×Ó²ãµÈ£¬¶øÕâЩ΢½á¹¹Êܵ½¹¤ÒÕÌõ¼þµÄÓ°Ï죬È磺³Á»ý¹ý³ÌÖлùƬµÄζȣ¬Íâ¼Ó´Å³¡£¬³Á»ýËÙÂÊ£¬±¾µ×Õæ¿ÕºÍ¹¤×÷ÆøÑ¹£¬ÒÔ¼°ÈÈ´¦ÀíµÈ¡£ In general, the AMR value is affected by the material¡¯s micro-structure properties, including the composition, film thickness, grain size, internal stress, texture, impurity atoms, and seed layer. And these micro-structure properties are strongly influenced by various process factors, such as applied external magnetic field, deposition temperature, deposition rate, working pressure, and heat treatment method. |

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