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Before introducing the AMR research progress of traditional AMR films, it is necessary to define the parameters to be optimized as well as their relationship in AMR sensors.
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a new generation of high-sensitivity sensors need to have high magnetic field sensitivity (Sv) and signal-to-noise ratio (or low noise), with high Sv the key parameter.
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In general, the micro-structure of the material affects the AMR value, including the composition of the material, film thickness, grain size, internal stress, texture, impurity atoms, seed layer, etc. And the micro-structure is under the influence of various factors, such as: substrate temperature during deposition, external magnetic field, deposition rate, base and working pressure, and heat treatment.
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Before introducing the recent advances of traditional AMR films, it is necessary to clarify the parameters to be optimized for AMR sensors and their relations.

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The new generation of high-sensitivity sensors requires materials with high magnetic field sensitivity (Sv) and signal-to-noise ratio (or low noise), where high Sv is the prior key parameter to be obtained.


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In general, the AMR value is affected by micro-structure of the material, including the composition of the material, film thickness, grain size, internal stress, texture, impurity atoms, and seed layer. And these micro-structures are under the influence of process conditions such as substrate temperature during deposition, external magnetic field, deposition rate, base and working pressure, and heat treatment.
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ÄûÃÊÊ÷: ½ð±Ò+8, ·­ÒëEPI+1, ¡ï¡ï¡ï¡ï¡ï×î¼Ñ´ð°¸, ºÜºÃ°¡ 2013-04-17 11:28:23
Ref:
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Before introducing the research progress of the traditional AMR films, it is necessary to define the relationships between the parameters that need to be optimized in AMR sensors.

2.ÐÂÒ»´ú¸ßÁéÃô¶È´«¸ÐÆ÷ÐèÒª²ÄÁϸߵĴų¡ÁéÃô¶È£¨Sv£©ºÍÐÅÔë±È£¨»ò³ÆµÍÔëÒô£©£¬¶ø¸ßµÄSvÊÇÐèÒªÊ×ÏÈ»ñµÃµÄ¹Ø¼üÖ¸±ê¡£

The new generation of high-sensitivity sensors should have high magnetic field sensitivity (Sv) and signal-to-noise ratio (low noise level), whereas the former is the key parameter for evaluating the AMR sensor.

3.ͨ³££¬²ÄÁϵÄ΢½á¹¹Ó°Ïìן÷ÏòÒìÐԴŵç×èЧӦ£¬Õâ°üÀ¨²ÄÁϵijɷ֣¬±¡Ä¤ºñ¶È£¬¾§Á£³ß´ç£¬ÄÚÓ¦Á¦£¬Ö¯¹¹£¬ÔÓÖÊÔ­×Ó£¬ÖÖ×Ó²ãµÈ£¬¶øÕâЩ΢½á¹¹Êܵ½¹¤ÒÕÌõ¼þµÄÓ°Ï죬È磺³Á»ý¹ý³ÌÖлùƬµÄζȣ¬Íâ¼Ó´Å³¡£¬³Á»ýËÙÂÊ£¬±¾µ×Õæ¿ÕºÍ¹¤×÷ÆøÑ¹£¬ÒÔ¼°ÈÈ´¦ÀíµÈ¡£

In general, the AMR value is affected by the material¡¯s micro-structure properties, including the composition, film thickness, grain size, internal stress, texture, impurity atoms, and seed layer. And these micro-structure properties are strongly influenced by various process factors, such as applied external magnetic field, deposition temperature, deposition rate, working pressure, and heat treatment method.
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