|
|
¡¾´ð°¸¡¿Ó¦Öú»ØÌû
¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ÄûÃÊÊ÷: ½ð±Ò+8, ·ÒëEPI+1, ¡ï¡ï¡ï¡ï¡ï×î¼Ñ´ð°¸, ºÜºÃ°¡ 2013-04-17 11:28:23
Ref:
1.½éÉÜ´«Í³ÆÂĪºÏ½ðAMRÑо¿½øÕ¹Ö®Ç°£¬ÏÈÀ´Ã÷È·AMR´«¸ÐÆ÷ÐèÒªÓÅ»¯µÄÖ¸±ê¼°ÆäÖ®¼ä¹ØÏµ¡£
Before introducing the research progress of the traditional AMR films, it is necessary to define the relationships between the parameters that need to be optimized in AMR sensors.
2.ÐÂÒ»´ú¸ßÁéÃô¶È´«¸ÐÆ÷ÐèÒª²ÄÁϸߵĴų¡ÁéÃô¶È£¨Sv£©ºÍÐÅÔë±È£¨»ò³ÆµÍÔëÒô£©£¬¶ø¸ßµÄSvÊÇÐèÒªÊ×ÏÈ»ñµÃµÄ¹Ø¼üÖ¸±ê¡£
The new generation of high-sensitivity sensors should have high magnetic field sensitivity (Sv) and signal-to-noise ratio (low noise level), whereas the former is the key parameter for evaluating the AMR sensor.
3.ͨ³££¬²ÄÁϵÄ΢½á¹¹Ó°Ïìן÷ÏòÒìÐԴŵç×èЧӦ£¬Õâ°üÀ¨²ÄÁϵijɷ֣¬±¡Ä¤ºñ¶È£¬¾§Á£³ß´ç£¬ÄÚÓ¦Á¦£¬Ö¯¹¹£¬ÔÓÖÊÔ×Ó£¬ÖÖ×Ó²ãµÈ£¬¶øÕâЩ΢½á¹¹Êܵ½¹¤ÒÕÌõ¼þµÄÓ°Ï죬È磺³Á»ý¹ý³ÌÖлùƬµÄζȣ¬Íâ¼Ó´Å³¡£¬³Á»ýËÙÂÊ£¬±¾µ×Õæ¿ÕºÍ¹¤×÷ÆøÑ¹£¬ÒÔ¼°ÈÈ´¦ÀíµÈ¡£
In general, the AMR value is affected by the material¡¯s micro-structure properties, including the composition, film thickness, grain size, internal stress, texture, impurity atoms, and seed layer. And these micro-structure properties are strongly influenced by various process factors, such as applied external magnetic field, deposition temperature, deposition rate, working pressure, and heat treatment method. |
|