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【答案】应助回帖
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柠檬树: 金币+8, 翻译EPI+1, ★★★★★最佳答案, 很好啊 2013-04-17 11:28:23
Ref:
1.介绍传统坡莫合金AMR研究进展之前，先来明确AMR传感器需要优化的指标及其之间关系。
Before introducing the research progress of the traditional AMR films, it is necessary to define the relationships between the parameters that need to be optimized in AMR sensors.
2.新一代高灵敏度传感器需要材料高的磁场灵敏度（Sv）和信噪比（或称低噪音），而高的Sv是需要首先获得的关键指标。
The new generation of high-sensitivity sensors should have high magnetic field sensitivity (Sv) and signal-to-noise ratio (low noise level), whereas the former is the key parameter for evaluating the AMR sensor.
3.通常，材料的微结构影响着各向异性磁电阻效应，这包括材料的成分，薄膜厚度，晶粒尺寸，内应力，织构，杂质原子，种子层等，而这些微结构受到工艺条件的影响，如：沉积过程中基片的温度，外加磁场，沉积速率，本底真空和工作气压，以及热处理等。
In general, the AMR value is affected by the material’s micro-structure properties, including the composition, film thickness, grain size, internal stress, texture, impurity atoms, and seed layer. And these micro-structure properties are strongly influenced by various process factors, such as applied external magnetic field, deposition temperature, deposition rate, working pressure, and heat treatment method. |
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