±±¾©Ê¯ÓÍ»¯¹¤Ñ§Ôº2026ÄêÑо¿ÉúÕÐÉú½ÓÊÕµ÷¼Á¹«¸æ
²é¿´: 2096  |  »Ø¸´: 13

lizhi8172

½ð³æ (ÕýʽдÊÖ)

[ÇóÖú] ÇóÖú²éÕÒ2ƪSCIÂÛÎĵļìË÷ºÅ

1.·¢±íÔÚPHYSICS OF PLASMAS 19, 033510 (2012)ÉÏÃæµÄһƪÎÄÕ£¬Zhi Li, Zhen Zhao, and Xuehui Li.    doi: 10.1063/1.3691894£¬ÌâÄ¿ÊÇ£ºNumerical model of an Ar/NH3 atmospheric pressure direct current discharge in parallel plate geometry¡£Âé·³°ïæ²éһϼìË÷ºÅ£¬¸Ð¼¤²»¾¡£¡
2.·¢±íÔÚJOURNAL OF APPLIED PHYSICS 111, 113304 (2012)ÉÏÃæµÄһƪÎÄÕ£¬Zhi Li, Zhen Zhao, and Xuehui Li.   doi: 10.1063/1.4728210£¬ÌâÄ¿ÊÇ£ºNumerical analysis of a mixture of Ar/NH3 microwave plasma chemical vapor deposition reactor¡£Âé·³°ïæ²éһϼìË÷ºÅ£¬¸Ð¼¤²»¾¡£¡
»Ø¸´´ËÂ¥

» ÊÕ¼±¾ÌûµÄÌÔÌûר¼­ÍƼö

Physics of Plasmas

» ²ÂÄãϲ»¶

» ±¾Ö÷ÌâÏà¹Ø¼ÛÖµÌùÍÆ¼ö£¬¶ÔÄúͬÑùÓаïÖú:

ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

416726641

½ð³æ (ÕýʽдÊÖ)

¡¾´ð°¸¡¿Ó¦Öú»ØÌû

¸Ðл²ÎÓ룬ӦÖúÖ¸Êý +1
Èë²ØºÅ: WOS:000302226500086 µÚһƪ
¼ÓÓÍ£¡¼ÓÓÍ£¡¼ÓÓÍ£¡
2Â¥2012-12-06 10:01:12
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

chongjibo888

Ìú¸Ëľ³æ (ÖªÃû×÷¼Ò)

¡¾´ð°¸¡¿Ó¦Öú»ØÌû

¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï ¡ï
¸Ðл²ÎÓ룬ӦÖúÖ¸Êý +1
lizhi8172: ½ð±Ò+50, ¡ï¡ï¡ï¡ï¡ï×î¼Ñ´ð°¸, лл 2012-12-09 10:07:32
Numerical model of an Ar/NH3 atmospheric pressure direct current discharge in parallel plate geometry  
×÷Õß: Li, Z (Li, Zhi)1,2; Zhao, Z (Zhao, Zhen)3,4; Li, XH (Li, Xuehui)1,5  
À´Ô´³ö°æÎï: PHYSICS OF PLASMAS  ¾í: 19   ÆÚ: 3     ÎÄÏ׺Å: 033510   DOI: 10.1063/1.3691894   ³ö°æÄê: MAR 2012  
±»ÒýƵ´Î: 1 (À´×Ô Web of Science)  
ÒýÓõIJο¼ÎÄÏ×: 62 [ ²é¿´ Related Records ]     ÒýÖ¤¹ØÏµÍ¼      
ÕªÒª: A one dimensional fluid model is used to investigate the role of ammonia added to an argon DC discharge at atmospheric pressure. The equations solved are the particle balances, assuming a drift-diffusion approximation for the fluxes, and the electron energy balance equation. The self-consistent electric field is obtained from the simultaneous solution of Poisson's equation. The electron-neutral collision rates are expressed as a function of the average electron energy. The model is comprised of 40 species (neutrals, radicals, ions, and electrons). In total, 75 electron-neutral, 43 electron-ion, 167 neutral-neutral, 129 ion-neutral, 28 ion-ion, and 90 3-body reactions are used in the model. The effects of gas mixing ratio on the densities of plasma species are systematically investigated. The calculated densities of the main plasma species are presented. It is found that in an Ar/NH3 plasma, the main neutrals (Ar*, Ar**, NH3*, NH, H-2, NH2, H, and N-2) are present at high densities. The Ar-2(+) and Ar+ ions are the dominant ions in the plasma. Furthermore, the NH3+ ions have a relatively higher density than other ammonia ions, whereas the density of other ions is negligible. Finally, a comparison is made between a pure Ar discharge and dielectric barrier discharge in a mixture of Ar/NH3. It is demonstrated that gas mixing ratio has a significant effect on the densities of plasma species, besides ammonia radical molecules and ammonia ions, and it also affects their ratio. Once the mixing ratio of Ar/NH3 is close to 1: 1 at atmospheric pressure, the densities of NH, NH2+ and NH4+ reach to the maximum. The maximum of the different positive ammonia ions corresponds to the different ammonia mixing ratio. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3691894]  
Èë²ØºÅ: WOS:000302226500086  
ÎÄÏ×ÀàÐÍ: Article  
ÓïÖÖ: English  
KeyWords Plus: CROSS-SECTIONS; NITROGEN; PLASMAS; GENERATION; AMMONIA; SURFACE  
ͨѶ×÷ÕßµØÖ·: Li, Z (ͨѶ×÷Õß),Dalian Univ Technol, Sch Phys & Optoelect Engn, Dalian 116024, Peoples R China.  
µØÖ·:
1. Dalian Univ Technol, Sch Phys & Optoelect Engn, Dalian 116024, Peoples R China
2. Univ Sci & Technol Liaoning, Sch Sci, Anshan 114051, Peoples R China
3. Anshan Normal Univ, Dept Chem, Anshan 114007, Peoples R China
4. Univ Sci & Technol Liaoning, Sch Chem Engn, Anshan 114051, Peoples R China
5. Dalian Univ, Phys Sci & Tech Coll, Dalian 116622, Peoples R China  
µç×ÓÓʼþµØÖ·: lizhi81723700@163.com  
»ù½ð×ÊÖúÖÂл:
»ù½ð×ÊÖú»ú¹¹ ÊÚȨºÅ
National Science Foundation, People's Republic of China  51077006  

[ÏÔʾ»ù½ð×ÊÖúÐÅÏ¢][Òþ²Ø»ù½ð×ÊÖúÐÅÏ¢]   

This work was partly supported by Grant No. 51077006 from the National Science Foundation, People's Republic of China. Finally, we wish to thank Professor Mark J. Kushner (Electrical Engineering and Computer Science Department, University of Michigan, Ann Arbor) for the useful information about the cross sections of NH2 and NH3 used in the model.

³ö°æÉÌ: AMER INST PHYSICS, CIRCULATION & FULFILLMENT DIV, 2 HUNTINGTON QUADRANGLE, STE 1 N O 1, MELVILLE, NY 11747-4501 USA  
Web of Science Àà±ð: Physics, Fluids & Plasmas  
Ñо¿·½Ïò: Physics  
IDS ºÅ: 918CJ  
ISSN: 1070-664X
ÏàÐÅ×Ô¼º£¡
3Â¥2012-12-06 10:01:23
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

chongjibo888

Ìú¸Ëľ³æ (ÖªÃû×÷¼Ò)

¡¾´ð°¸¡¿Ó¦Öú»ØÌû

Numerical analysis of a mixture of Ar/NH3 microwave plasma chemical vapor deposition reactor  
×÷Õß: Li, Z (Li, Zhi)1,2; Zhao, Z (Zhao, Zhen)3,4; Li, XH (Li, Xuehui)1,5  
À´Ô´³ö°æÎï: JOURNAL OF APPLIED PHYSICS  ¾í: 111   ÆÚ: 11     ÎÄÏ׺Å: 113304   DOI: 10.1063/1.4728210   ³ö°æÄê: JUN 1 2012  
±»ÒýƵ´Î: 0 (À´×Ô Web of Science)  
ÒýÓõIJο¼ÎÄÏ×: 20 [ ²é¿´ Related Records ]     ÒýÖ¤¹ØÏµÍ¼      
ÕªÒª: A two-dimensional fluid model has been used to investigate the properties of plasma in Ar/NH3 microwave electron cyclotron resonance discharge at low pressure. The electromagnetic field model solved by the three-dimensional Simpson method is coupled to a fluid plasma model. The finite difference method was employed to discrete the governing equations. 40 species (neutrals, radicals, ions, and electrons) are consisted in the model. In total, 75 electron-neutral, 43 electronion, 167 neutral-neutral, 129 ion-neutral, 28 ion-ion, and 90 3-body reactions are used in the model. According to the simulation, the distribution of the densities of the considered plasma species has been showed and the mechanisms of their variations have been discussed. It is found that the main neutrals (Ar*, Ar**, NH3*, NH, H-2, NH2, H, and N-2) are present at high densities in Ar/NH3 microwave electron cyclotron resonance discharge when the mixing ratio of Ar/NH3 is 1:1 at 20 Pa. The density of NH is more than that of NH2 atom. And NH3+ are the most important ammonia ions. But the uniformity of the space distribution of NH3+ is lower than the other ammonia ions. (C) 2012 American Institute of Physics. [http://dx.doi. org/10.1063/1.4728210]  
Èë²ØºÅ: WOS:000305401400048  
ÎÄÏ×ÀàÐÍ: Article  
ÓïÖÖ: English  
KeyWords Plus: DISCHARGE; NITROGEN; MODEL  
ͨѶ×÷ÕßµØÖ·: Li, Z (ͨѶ×÷Õß),Dalian Univ Technol, Sch Phys & Optoelect Engn, Dalian 116024, Peoples R China.  
µØÖ·:
1. Dalian Univ Technol, Sch Phys & Optoelect Engn, Dalian 116024, Peoples R China
2. Univ Sci & Technol Liaoning, Sch Sci, Anshan 114051, Peoples R China
3. Anshan Normal Univ, Dept Chem, Anshan 114007, Peoples R China
4. Univ Sci & Technol Liaoning, Sch Chem Engn, Anshan 114051, Peoples R China
5. Dalian Univ Technol, Phys Sci & Tech Coll, Dalian 116622, Peoples R China  
µç×ÓÓʼþµØÖ·: lxh49dlu@163.com  
³ö°æÉÌ: AMER INST PHYSICS, CIRCULATION & FULFILLMENT DIV, 2 HUNTINGTON QUADRANGLE, STE 1 N O 1, MELVILLE, NY 11747-4501 USA  
Web of Science Àà±ð: Physics, Applied  
Ñо¿·½Ïò: Physics  
IDS ºÅ: 960PW  
ISSN: 0021-8979
ÏàÐÅ×Ô¼º£¡
4Â¥2012-12-06 10:01:55
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

416726641

½ð³æ (ÕýʽдÊÖ)

¡¾´ð°¸¡¿Ó¦Öú»ØÌû

Èë²ØºÅ: WOS:000305401400048  µÚ¶þƪ
¼ÓÓÍ£¡¼ÓÓÍ£¡¼ÓÓÍ£¡
5Â¥2012-12-06 10:02:16
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

416726641

½ð³æ (ÕýʽдÊÖ)

ÕâÄêÍ· ÉúÒâ²»ºÃ×ö°¡   ¾ºÕù̫ǿ

» ±¾ÌûÒÑ»ñµÃµÄºì»¨£¨×îÐÂ10¶ä£©

¼ÓÓÍ£¡¼ÓÓÍ£¡¼ÓÓÍ£¡
6Â¥2012-12-06 10:03:27
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
7Â¥2012-12-06 10:07:03
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

tastefulboy

Ìú³æ (ÕýʽдÊÖ)

¹þ¹þ£¬Ç¿ÈËÌ«¶àÁË£¬±¾ÏëÓ¦Öú£¬½á¹ûÒѾ­ÓÐÈ˽Ý×ãÏȵǣ¬¹§Ï²£¬Á½ÆªSCI

» ±¾ÌûÒÑ»ñµÃµÄºì»¨£¨×îÐÂ10¶ä£©

8Â¥2012-12-06 10:58:13
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

nuaawq

ÖÁ×ðľ³æ (ÖªÃû×÷¼Ò)

¡¾´ð°¸¡¿Ó¦Öú»ØÌû

¸Ðл²ÎÓ룬ӦÖúÖ¸Êý +1
Physics of Plasmas / Volume 19 / Issue 3 / ARTICLES / Low-Temperature Plasmas, Plasma Applications, Plasma Sources, Sheaths Previous Article | Next Article
FULL-TEXT OPTIONS:

Read Online (HTML)Download PDF Permissions / Reprints
Phys. Plasmas 19, 033510 (2012); http://dx.doi.org/10.1063/1.3691894 (10 pages)
This paper appears in:
Journal of Applied Physics
Date of Publication: Jun 2012
Author(s): Li, Zhi
School of Physics and Optoelectronic Engineering, Dalian University of Technology, Dalian 116024, People¡¯s Republic of China
Zhao, Zhen ;  Li, Xuehui
Volume: 111 , Issue: 11
Page(s): 113304        - 113304-5
Product Type: Journals & Magazines

» ±¾ÌûÒÑ»ñµÃµÄºì»¨£¨×îÐÂ10¶ä£©

9Â¥2012-12-06 16:24:16
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

chongjibo888

Ìú¸Ëľ³æ (ÖªÃû×÷¼Ò)

¡¾´ð°¸¡¿Ó¦Öú»ØÌû

Â¥Ö÷ÄãµÄ½ð±ÒÔõô»¹Ã»·¢ÄØ£¿ºÃ¼¸ÌìÁËŶ£¬Óе㲻ºñµÀѽ£¡£¡£¡È˼ҿÉÊǵÚһʱ¿Ì¸øÄã²é¼ìË÷µÄŶ£¡£¡£¡

» ±¾ÌûÒÑ»ñµÃµÄºì»¨£¨×îÐÂ10¶ä£©

ÏàÐÅ×Ô¼º£¡
10Â¥2012-12-09 09:05:30
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
Ïà¹Ø°æ¿éÌø×ª ÎÒÒª¶©ÔÄÂ¥Ö÷ lizhi8172 µÄÖ÷Ìâ¸üÐÂ
×î¾ßÈËÆøÈÈÌûÍÆ¼ö [²é¿´È«²¿] ×÷Õß »Ø/¿´ ×îºó·¢±í
[¿¼ÑÐ] Ò»Ö¾Ô¸ÉϺ£º£Ñó´óѧ083200ʳƷѧ˶£¬Çóµ÷¼Á£¬½ÓÊÜÆäËûרҵ083200 +4 whatÕÅ 2026-04-04 5/250 2026-04-05 14:07 by chw1980_0
[¿¼ÑÐ] 285Çóµ÷¼Á +10 ŶßϺôo 2026-04-04 10/500 2026-04-05 11:12 by guoweigw
[¿¼ÑÐ] ÉúÎ﹤³ÌÇóµ÷¼Á +6 ϲ»¶»¹ÊDz»¸ÊÐÄ 2026-04-05 6/300 2026-04-05 10:28 by ÌÆãå¶ù
[¿¼ÑÐ] ¿¼Ñе÷¼Á +3 mcbbc 2026-04-04 3/150 2026-04-05 10:03 by barlinike
[¿¼ÑÐ] ²ÄÁϵ÷¼Á +10 ÀÁÑòÑòÇáÖÃÓñÍÎ 2026-04-02 11/550 2026-04-04 21:56 by laoshidan
[¿¼ÑÐ] ²ÄÁÏÓ뻯¹¤306·ÖÕÒµ÷¼Á +23 ²×º£ÇáÖÛe 2026-04-02 27/1350 2026-04-04 21:52 by laoshidan
[¿¼ÑÐ] 333Çóµ÷¼Á +12 wfh030413@ 2026-04-03 13/650 2026-04-04 21:02 by jj987
[¿¼ÑÐ] »·¾³¿ÆÑ§Ó빤³Ì334·ÖÇóµ÷¼Á +9 ÍõÒ»Ò»ÒÀÒÀ 2026-03-30 12/600 2026-04-04 20:55 by dongzh2009
[¿¼ÑÐ] 301Çóµ÷¼Á +18 ÂæÍÕÄÐÈË 2026-04-02 18/900 2026-04-04 20:33 by À¶ÔÆË¼Óê
[¿¼ÑÐ] µ÷¼Á +4 ÊÇ¿ÉÀÖ²»ÊÇ¿ÉÀÖ 2026-04-04 4/200 2026-04-04 19:41 by ÌÆãå¶ù
[¿¼ÑÐ] ¿¼Ñе÷¼Á +4 ÃÀÀöµÄyouth_ 2026-04-04 5/250 2026-04-04 17:16 by imissbao
[¿¼ÑÐ] Çóµ÷¼Á +3 ũҵ¹¤³ÌÓëÐÅÏ¢¼ 2026-04-04 3/150 2026-04-04 12:19 by Éá¶øºóµÃ
[¿¼ÑÐ] Çóµ÷¼Á£¬Ò»Ö¾Ô¸±±¾©ÖÐÒ½Ò©´óѧ +3 СС´ï²»Áï 2026-04-02 3/150 2026-04-03 22:55 by ³åʸêÄÐÇÍÅ
[¿¼ÑÐ] ѧ˶»úе¹¤³Ì303Çóµ÷¼Á +6 ÎÞÃûËùÒÔ½ÐÎâÃ÷ 2026-03-30 7/350 2026-04-03 16:48 by asdfzly
[¿¼ÑÐ] ¹¤¿Æ341·Öµ÷¼Á +3 Âå¶àÂÞ 2026-04-03 3/150 2026-04-03 14:20 by 1753564080
[¿¼ÑÐ] ½¨»·£¬ÄÜÔ´£¬ÍÁľÀÏʦ·¹ý¿´Ò»¿´£¡£¡£¡ +5 ºÙºÙuu 2026-04-01 5/250 2026-04-03 11:47 by znian
[¿¼ÑÐ] Ò»Ö¾Ô¸±±¾©¿Æ¼¼´óѧ²ÄÁÏѧ˶328·ÖÇóµ÷¼Á +6 1¶Îʱ¼ä 2026-03-31 7/350 2026-04-02 13:57 by 3041
[¿¼ÑÐ] 302Çóµ÷¼ÁÒ»Ö¾Ô¸±±º½070300£¬±¾¿ÆÖ£´ó»¯Ñ§ +8 Ê¥ÈÕ¶úÂüÌõ 2026-04-01 11/550 2026-04-02 07:40 by chemdavid
[¿¼ÑÐ] ¿¼Ñе÷¼ÁÇóÖú +7 13287130938 2026-03-31 7/350 2026-03-31 16:39 by 690616278
[¿¼ÑÐ] 262Çóµ÷¼Á +7 ZZ..000 2026-03-30 8/400 2026-03-31 10:05 by cal0306
ÐÅÏ¢Ìáʾ
ÇëÌî´¦ÀíÒâ¼û