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The other silicon sample was divided into two equal portions and marked 1 and 2. {ÁíÍâÒ»¸ö¹èÑùÆ··ÖΪÏàµÈµÄÁ½²¿·Ö£¬²¢±ê¼ÇΪÑùÆ·1ºÍÑùÆ·2¡£} As a specific example, this paper presents an initial study on the effect of co-passivation with carbon plasma and oxygen anions at low temperatures after a chemical modification of the silicon surface when a majority of metastable Si¨CH bonds are changed into stable Si¨CC, Si¨CC¨CO and SiO2 bonds. {×÷Ϊһ¸öÌØÀý£¬ÎÄÕÂÑо¿ÁËcarbon plasma and oxygen anions ¶ÔÑùÆ·¹²Í¬¶Û»¯µÄÓ°Ï죺carbon plasma and oxygen anions Äܸı䣨modification£©¹èµÄ±íÃæÒÔΪ¿ÉÒÔÔÚ¹è±íÃæÉϵ¼Ö´óÁ¿·ÇÎȶ¨µÄSi¨CH ±»Îȶ¨µÄ Si¨CC, Si¨CC¨CO and SiO2 bonds´úÌæ¡£} |
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zerohead
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2Â¥2010-07-16 09:48:14
zerohead
½û³æ (Ö°Òµ×÷¼Ò)
- ·ÒëEPI: 466
- Ó¦Öú: 1 (Ó×¶ùÔ°)
- ¹ó±ö: 0.301
- ½ð±Ò: 8727.8
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- Ìû×Ó: 3768
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- ×¢²á: 2010-06-14
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·¢Ñ¿ÍÁ¶¹(½ð±Ò+1):лл²ÎÓë 2010-07-17 08:40:51
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×÷Ϊһ¸öÌØÀý£¬ÎÄÕÂÑо¿ÁËcarbon plasma and oxygen anions ¶ÔÑùÆ·¹²Í¬¶Û»¯µÄÓ°Ï죺carbon plasma and oxygen anions Äܸı䣨modification£©¹èµÄ±íÃæÒÔΪ¿ÉÒÔÔÚ¹è±íÃæÉϵ¼Ö´óÁ¿·ÇÎȶ¨µÄSi¨CH ±»Îȶ¨µÄ Si¨CC, Si¨CC¨CO and SiO2 bonds´úÌæ¡£ As a specific example, this paper presents a preliminary study on the effects of carbon plasma and oxygen anions on co-passivation at low temperatures. It is found that most of the metastable Si¨CH bonds can be broken and replaced by stable Si¨CC, Si¨CC¨CO and SiO2 bonds. |
3Â¥2010-07-16 10:00:30













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