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| ITO薄膜作为PTCDA/Si--有机/无机光电探测器的阳极时，衬底材料为不耐高温的有机物，ITO薄膜需在低温下淀积。本文通过射频磁控溅射在玻璃衬底表面淀积ITO透明导电薄膜，通过四探针和紫外可见-近红外光谱试仪分别测量薄膜的导电性、透光率。实验结果表明：随着溅射过程压力的升高，薄膜的透过率和电阻率都会逐渐变差；随着溅射功率的增大，薄膜的电阻率会变好但是透过率会变差；氧气分压的增加虽然在一定程度上有助于薄膜透过率的提高，同时导致薄膜的电阻率的增加；但对薄膜进行高温下的退火则会很好的降低薄膜的电阻率。结论：在低温下制备ITO薄膜的优化工艺条件为：溅射气压为0.45Pa，功率为45W，溅射时以氧气作为反应气体，不需对成品器件进行退火处理。 |
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clwang
木虫 (正式写手)
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3楼2009-08-10 15:42:55
2楼2009-08-10 10:54:09
4楼2009-08-11 01:18:20
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zap65535(金币+29,VIP+0):补发 12-23 13:22
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zap65535(金币+29,VIP+0):补发 12-23 13:22
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| When ITO thin film is taken as PTCDA/Si-- organic/inorganic photodetector anode, the substrate material is organic substance that can not withstand high temperature. ITO thin film deposition at low temperature is required. In this paper, RF magnetron sputtering on glass substrate surface is used to deposit ITO transparent conductive film. Then, through four-point probe and ultraviolet visible near-infrared spectroscopy measurement are applied to test conductivity and light transmission rate. The experimental results show that with the increasing pressure in sputtering process, film transmittance and resistivity will gradually deteriorate. While as sputtering power increases, resistivity of thin film will become a good performance but transmittance deteriorated. However, the increase in oxygen partial pressure to some extent, can contribute to improvement of transmittance, at the same time lead resistivity of film increases. But under high-temperature film annealing will reduce resistivity greatly. |
6楼2009-08-11 16:19:38
