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forever

木虫 (正式写手)

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在线: 160小时
虫号: 108104
注册: 2005-11-18
性别: GG
专业: 光学

[交流] 很不错的XRD测量书籍，推荐给大家，免费下载，谢谢！

【书籍】X-Ray_Metrology_in_Semiconductor_Manufacturing.pdf

曾经在网上搜寻到的很不错的晶体测量书籍，但找不到原来的地址了，抱歉，再上传一份给大家，谢谢！
对测量单晶多晶的各种参数都有很详细的论述，推荐给学习xrd 测量的虫虫们。

下载地址：
http://www.namipan.com/downfile/ ... e93bf0eb19e7cecc200

本书介绍：
Engineering Book from C.H.I.P.S.

--------------------------------------------------------------------------------

X-Ray Metrology in Semiconductor Manufacturing
by David K. Bowen
X-Ray Metrology in Semiconductor Manufacturing provides real solutions with a focus on accuracy, repeatability, and throughput.

Features:

Offers the first practical guide to x-ray metrology methods and applications
Reflects the knowledge of distinguished leaders in the field and the industrial experience of the world's leading semiconductor XRM company
Emphasizes practical metrology, focusing on real-world problems and solutions organized by application
Supplies an abundance of examples, illustrations, and references to more in-depth theoretical information
Includes summaries of fundamentals and key concepts for each method placed in "grey boxes" throughout the book
Contents

The Applications

Scope of X-Ray Metrology (XRM)
Specular X-Ray Reflectivity (XRR)
Diffuse Scatter
X-Ray Diffraction
High-Resolution X-Ray Diffraction
Diffraction Imaging and Defect Mapping
X-Ray Fluorescence
Thickness Metrology
Dielectrics and Metals
Multiple Layers
Epitaxial Layers
Composition and Phase Metrology
Amorphous Films
Polycrystalline Films
Wafers and Epitaxial Films
Strain and Stress Metrology
Strain and Stress in Polycrystalline Layers
Relaxation of Epitaxial Layers
Thin Strained Silicon Layers
Whole Wafer Defect Metrology
Mosaic Metrology
Grain Size Measurement
Mosaic Structure in Substrate Wafers
Mosaic Structure in Epilayers
Interface Roughness Metrology
Interface Width and Roughness
Distinction of Roughness and Grading
Roughness Determination in Semiconductors
Roughness Determination in Metallic Films
Roughness Determination in Dielectrics
Porosity Metrology
Determination of Porosity
Determination of Pore Size and Distribution
Pores in Single Crystals
The Science

Specular X-Ray Reflectivity
Specular Reflectivity from a Single Ideal Interface
Specular Reflectivity from a Single Graded or Rough Interface
Specular Reflectivity from a Single Thin Film on a Substrate
Specular Reflectivity from Multiple Layers on a Substrate
X-Ray Diffuse Scattering
Origin of Diffuse Scatter from Surfaces and Interfaces
The Born Approximation
The Distorted-Wave Born Approximation
Effect of Interface Parameters on Diffuse Scatter
Multiple-Layer Structures
Diffuse Scatter Represented in Reciprocal Space
Theory of XRD on Polycrystals
Kinematical Theory of X-Ray Diffraction
Determination of Strain
Determination of Grain Size
Texture
Reciprocal Space Geometry
High-Resolution XRD on Single Crystals
Dynamical Theory of X-Ray Diffraction
The Determination of Epilayer Parameters
High-Resolution Diffraction in Real and Reciprocal Space
Diffraction Imaging and Defect Mapping
Contrast in X-Ray Diffraction Imaging (XRDI)
Spatial Resolution in XRDI
X-Ray Defect Imaging Methods
Example Applications
The Technology

Modeling and Analysis
What Has Been Measured?
Direct Methods
Data-Fitting Methods
The Differential Evolution Method
Requirements for Automated Analysis
Instrumentation
X-Ray Sources
X-Ray Optics
Mechanical Technology
Detectors
Practical Realizations
Accuracy and Precision of X-Ray Metrology
Design of X-Ray Metrology
Repeatability and Reproducibility
Accuracy and Trueness
Repeatability and Throughput
Absolute Tool Matching
Specimen-Induced Limitations

[ Last edited by forever on 2009-3-9 at 15:51 ]

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