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forever木虫 (正式写手)
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很不错的XRD测量书籍，推荐给大家，免费下载，谢谢！
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【书籍】X-Ray_Metrology_in_Semiconductor_Manufacturing.pdf 曾经在网上搜寻到的很不错的晶体测量书籍，但找不到原来的地址了，抱歉，再上传一份给大家，谢谢！ 对测量单晶多晶的各种参数都有很详细的论述，推荐给学习xrd 测量的虫虫们。 下载地址： http://www.namipan.com/downfile/ ... e93bf0eb19e7cecc200 本书介绍： Engineering Book from C.H.I.P.S. -------------------------------------------------------------------------------- X-Ray Metrology in Semiconductor Manufacturing by David K. Bowen X-Ray Metrology in Semiconductor Manufacturing provides real solutions with a focus on accuracy, repeatability, and throughput. Features: Offers the first practical guide to x-ray metrology methods and applications Reflects the knowledge of distinguished leaders in the field and the industrial experience of the world's leading semiconductor XRM company Emphasizes practical metrology, focusing on real-world problems and solutions organized by application Supplies an abundance of examples, illustrations, and references to more in-depth theoretical information Includes summaries of fundamentals and key concepts for each method placed in "grey boxes" throughout the book Contents The Applications Scope of X-Ray Metrology (XRM) Specular X-Ray Reflectivity (XRR) Diffuse Scatter X-Ray Diffraction High-Resolution X-Ray Diffraction Diffraction Imaging and Defect Mapping X-Ray Fluorescence Thickness Metrology Dielectrics and Metals Multiple Layers Epitaxial Layers Composition and Phase Metrology Amorphous Films Polycrystalline Films Wafers and Epitaxial Films Strain and Stress Metrology Strain and Stress in Polycrystalline Layers Relaxation of Epitaxial Layers Thin Strained Silicon Layers Whole Wafer Defect Metrology Mosaic Metrology Grain Size Measurement Mosaic Structure in Substrate Wafers Mosaic Structure in Epilayers Interface Roughness Metrology Interface Width and Roughness Distinction of Roughness and Grading Roughness Determination in Semiconductors Roughness Determination in Metallic Films Roughness Determination in Dielectrics Porosity Metrology Determination of Porosity Determination of Pore Size and Distribution Pores in Single Crystals The Science Specular X-Ray Reflectivity Specular Reflectivity from a Single Ideal Interface Specular Reflectivity from a Single Graded or Rough Interface Specular Reflectivity from a Single Thin Film on a Substrate Specular Reflectivity from Multiple Layers on a Substrate X-Ray Diffuse Scattering Origin of Diffuse Scatter from Surfaces and Interfaces The Born Approximation The Distorted-Wave Born Approximation Effect of Interface Parameters on Diffuse Scatter Multiple-Layer Structures Diffuse Scatter Represented in Reciprocal Space Theory of XRD on Polycrystals Kinematical Theory of X-Ray Diffraction Determination of Strain Determination of Grain Size Texture Reciprocal Space Geometry High-Resolution XRD on Single Crystals Dynamical Theory of X-Ray Diffraction The Determination of Epilayer Parameters High-Resolution Diffraction in Real and Reciprocal Space Diffraction Imaging and Defect Mapping Contrast in X-Ray Diffraction Imaging (XRDI) Spatial Resolution in XRDI X-Ray Defect Imaging Methods Example Applications The Technology Modeling and Analysis What Has Been Measured? Direct Methods Data-Fitting Methods The Differential Evolution Method Requirements for Automated Analysis Instrumentation X-Ray Sources X-Ray Optics Mechanical Technology Detectors Practical Realizations Accuracy and Precision of X-Ray Metrology Design of X-Ray Metrology Repeatability and Reproducibility Accuracy and Trueness Repeatability and Throughput Absolute Tool Matching Specimen-Induced Limitations [ Last edited by forever on 2009-3-9 at 15:51 ] |
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