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To avoid lateral growth and agglomeration of Cu after reflow, a selective deposition profile (thinner field coverage and thicker bottom coverage) is essential as it ultilizes the above-mentioned phenomenon to drive the Cu downwards in to the narrow structures, creating a bottom-up PVD fill. Ó¢Ò뺺£¡¿ÉÒÔÒâÒë |
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ÄûÃÊÊ÷(¿Õλ´ú·¢): ½ð±Ò+10, ¸ÐлӦÖú 2016-01-05 16:37:47
ÄûÃÊÊ÷(¿Õλ´ú·¢): ½ð±Ò+10, ¸ÐлӦÖú 2016-01-05 16:37:47
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To avoid lateral growth and agglomeration of Cu after reflow, a selective deposition profile (thinner field coverage and thicker bottom coverage) is essential as it ultilizes the above-mentioned phenomenon to drive the Cu downwards in to the narrow structures, creating a bottom-up PVD fill. ΪÁ˱ÜÃâ»ØÁ÷ºóÍÔÚ²àÃæµÄÔö¼ÓºÍ½á¿é£¬±ØÐëÒª¾ß±¸Ò»ÖÖ¾«Ñ¡µÄ³Á»ýÆÊÃæ£¨±¡³¡¸²¸ÇºÍºñµ×¸²¸Ç£©£¬ÕâÖÖÆÊÃæÀûÓÃÒÔÉÏÌáµ½µÄÏÖÏóÀ´ÇýʹÍÍùÏÂÒÆ¶¯½øÈëÏÁյĽṹÖУ¬²úÉúÒ»Öֵײ¿³¯ÉϵÄPVD×°Ìî¡£ |
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