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To avoid lateral growth and agglomeration of Cu after reflow, a selective deposition profile (thinner field coverage and thicker bottom coverage) is essential as it ultilizes the above-mentioned phenomenon to drive the Cu downwards in to the narrow structures, creating a bottom-up PVD fill. 英译汉!可以意译 |
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柠檬树(空位代发): 金币+10, 感谢应助 2016-01-05 16:37:47
柠檬树(空位代发): 金币+10, 感谢应助 2016-01-05 16:37:47
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To avoid lateral growth and agglomeration of Cu after reflow, a selective deposition profile (thinner field coverage and thicker bottom coverage) is essential as it ultilizes the above-mentioned phenomenon to drive the Cu downwards in to the narrow structures, creating a bottom-up PVD fill. 为了避免回流后铜在侧面的增加和结块,必须要具备一种精选的沉积剖面(薄场覆盖和厚底覆盖),这种剖面利用以上提到的现象来驱使铜往下移动进入狭窄的结构中,产生一种底部朝上的PVD装填。 |
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