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SnO2 thin films were deposited on glass substrates by using Successive Ionic Layer Adsorption and
Reaction (SILAR) method at room temperature. The film thickness effect on characteristic parameters
such as structural, morphological, optical and electrical properties of the films was studied. Also, the
films were annealed in oxygen atmosphere (400 C, 30 min) and characteristic parameters of the films
were investigated. The X-ray Diffraction (XRD) and Scanning Electron Microscopy (SEM) studies showed
that all the films exhibited polycrystalline nature with tetragonal structure and were covered well on
glass substrates. After the investigation of the crystalline and surface properties of the films, it was found
that they were improving with increasing film thickness. Optical band gap decreased from 3.90 eV to
3.54 eV and electrical conductivity changed between 0.015e0.815 (U-cm)L1 as the film thickness
increased from 215 to 490 nm. The refractive index (n), optical static and high frequency dielectric
constants ( 3o, 3N) values were calculated by using the optical band gap values as a function of the film
thickness.

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