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[资源] 微尺度加工：微产品的设计与制造（英文版）

Micro-Manufacturing: Design and Manufacturing of Micro-Products

简介如下：
This book is the first of its kind to collectively address design-based and mechanical micro-manufacturing topics in one place. It focuses on design and materials selection, as well as the manufacturing of micro-products using mechanical-based micro-manufacturing process technologies. After addressing the fundamentals and non-metallic-based micro-manufacturing processes in the semiconductor industry, it goes on to address specific metallic-based micro-manufacturing processes, such as: micro-forming, micro-machining, micro-molding, micro-laser processing, micro-layered manufacturing, micro-joining, micro-assembly and materials handling, and microEDM and ECM. The book provides an in-depth understanding of materials behavior at micro-scales and under different micro-scale processing conditions, while also including a wide variety of emerging micro-scale manufacturing issues and examples.
目录如下：
FOREWORD vii
CONTRIBUTORS ix
1 FUNDAMENTALS OF MICRO-MANUFACTURING 1
2 MICRO-FABRICATION PROCESSES IN
SEMICONDUCTOR INDUSTRY 25
3 MODELING AND ANALYSIS AT MICRO-SCALES 43
4 METROLOGY, INSPECTION, AND PROCESS CONTROL
IN MICRO-SCALES 71
5 MICRO-LAYERED MANUFACTURING 97
6 MICRO-LASER PROCESSING 159
7 POLYMER MICRO-MOLDING/FORMING PROCESSES 197
8 MECHANICAL MICRO-MACHINING 235
9 MICRO-FORMING 275
10 MICRO-ELECTRO DISCHARGE MACHINING (μEDM) 301
11 METAL INJECTION MOLDING AT MICRO-SCALES
(μMIM) 347
INDEX 371

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2014-11-27 09:01:13, 66.72 M