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±à¼Ö»¸øÁËÒ»¸öÉó¸åÈ˵ÄÒâ¼û£¬ÎÒ»Ö¸´ÁËÒԺ󣬱༵ÄÒâ¼ûÈçÏ£º²»ÖªÔõô¸öÒâ˼£¿ Reviewers' comments: Reviewer #1: The revisions made improve the manuscript significantly. However, I would like the figure showing the effect of Guinadine nitrate concentration on RR included in the manuscript. Once that is done, it can be accepted for publication. ALSO: For some reason there was no response to reviewer 2's comments: Recommendation (please tick one) Accept without modification: Request modifications: X (Complete Sections B and C of report form) Reject: (Complete Section D of report form) A. General Commentary Judgement of Paper: 6.5 (Use scale of 1-10. 1 = Poor, 5 = Marginal, 8 = Good, 10 - Exceptional ) In reading the manuscript, I caught a few mistakes. In the Abstract section the word "rate" is misspelled "rat." Page 8 - During CMP, cuprous oxides can be as inhibitors to maintain a low etch rate of copper in the trench¡. It would appear at least a word is missing, perhaps this could be better stated as - cuprous oxide may act as an inhibitor¡." Page 11 - "As we can be seen from Figure 9(b)¡.." The grammar seems awkward. |
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