±±¾©Ê¯ÓÍ»¯¹¤Ñ§Ôº2026ÄêÑо¿ÉúÕÐÉú½ÓÊÕµ÷¼Á¹«¸æ
²é¿´: 551  |  »Ø¸´: 0

Ò»µãºì

½ð³æ (ÕýʽдÊÖ)

[ÇóÖú] Ö»¸øÁËÒ»¸öÉó¸åÈ˵ÄÒâ¼û£¬Ð޸ĺó²»Ã÷°×±à¼­µÄÒâ˼

±à¼­Ö»¸øÁËÒ»¸öÉó¸åÈ˵ÄÒâ¼û£¬ÎÒ»Ö¸´ÁËÒԺ󣬱༭µÄÒâ¼ûÈçÏ£º²»ÖªÔõô¸öÒâ˼£¿
Reviewers' comments:


Reviewer #1: The revisions made improve the manuscript significantly. However, I would like the figure showing the effect of Guinadine nitrate  concentration on RR included in the manuscript. Once that is done, it can be accepted for publication.

ALSO: For some reason there was no response to reviewer 2's comments:

     Recommendation (please tick one)
Accept without modification:
Request modifications: X        (Complete Sections B and C of report form)
Reject:                         (Complete Section D of report form)


A.   General Commentary
Judgement of Paper:     6.5
(Use scale of 1-10. 1 = Poor, 5 = Marginal, 8 = Good, 10 - Exceptional )

In reading the manuscript, I caught a few mistakes.
In the Abstract section the word "rate" is misspelled "rat."

Page 8 - During CMP, cuprous oxides can be as inhibitors to maintain a low etch rate of copper in the trench¡­.
It would appear at least a word is missing, perhaps this could be better stated as -
cuprous oxide may act as an inhibitor¡­."
Page 11 - "As we can be seen from Figure 9(b)¡­.."  The grammar seems awkward.
»Ø¸´´ËÂ¥

» ²ÂÄãϲ»¶

ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
Ïà¹Ø°æ¿éÌø×ª ÎÒÒª¶©ÔÄÂ¥Ö÷ Ò»µãºì µÄÖ÷Ìâ¸üÐÂ
×î¾ßÈËÆøÈÈÌûÍÆ¼ö [²é¿´È«²¿] ×÷Õß »Ø/¿´ ×îºó·¢±í
[¿¼ÑÐ] Ò»Ö¾Ô¸211£¬»¯Ñ§Ñ§Ë¶£¬310·Ö£¬±¾¿ÆÖصãË«·Ç£¬Çóµ÷¼Á +12 ŬÁ¦·Ü¶·112 2026-04-04 12/600 2026-04-06 06:33 by houyaoxu
[¿¼ÑÐ] £¨µ÷¼Á£©Ò»Ö¾Ô¸±¨¿¼¹þ¶û±õ¹¤Òµ´óѧ0857×ÊÔ´Óë»·¾³×¨Òµ378·Ö¿¼Éú +7 ºÝºÝ¼ÓÓÍ 2026-04-05 7/350 2026-04-05 22:31 by dongzh2009
[¿¼ÑÐ] ²ÄÁϹ¤³Ì302·ÖÇóµ÷¼Á +9 zyxÉϰ¶£¡ 2026-04-04 9/450 2026-04-05 22:08 by ×íÎÌwl
[¿¼ÑÐ] 0854µç×ÓÐÅÏ¢319Çóµ÷¼Á£¨½ÓÊÜ¿çרҵµ÷¼Á£© +3 ÐÇÐDz»Õ£ÑÛà¶ 2026-04-05 3/150 2026-04-05 20:20 by à£à£à£0119
[¿¼ÑÐ] 296Çóµ÷¼Á +3 Íô£¡£¿£¡ 2026-04-05 4/200 2026-04-05 20:13 by à£à£à£0119
[¿¼ÑÐ] ¸´ÊÔµ÷¼Á +8 ´ºÈÕÀ´ÐÅ- 2026-04-03 8/400 2026-04-05 18:58 by À¶ÔÆË¼Óê
[¿¼ÑÐ] Ò»Ö¾Ô¸Ö£´ó0705Çóµ÷¼Á +3 éÙʮһ 2026-04-02 4/200 2026-04-05 00:05 by chongya
[¿¼ÑÐ] ר˶310Çóµ÷¼Á +5 ÀÌÀÌÎÒ¡­. 2026-04-04 6/300 2026-04-04 23:33 by barlinike
[¿¼ÑÐ] »·¾³¿ÆÑ§Ó빤³Ì334·ÖÇóµ÷¼Á +9 ÍõÒ»Ò»ÒÀÒÀ 2026-03-30 12/600 2026-04-04 20:55 by dongzh2009
[¿¼ÑÐ] µ÷¼Á0855-288 +5 xÐܶþa 2026-04-03 5/250 2026-04-04 00:19 by Öí»á·É
[¿¼ÑÐ] 305Çóµ÷¼Á +3 77Qi 2026-04-03 3/150 2026-04-03 23:01 by qzxyhcsy
[¿¼ÑÐ] Ó¢Ò»ÊýÒ»408£¬×Ü·Ö284£¬¶þÕ½Õæ³ÏÇóµ÷¼Á +13 12.27 2026-03-30 15/750 2026-04-03 14:41 by µªÆøÆøÆø
[¿¼ÑÐ] 309Çóµ÷¼Á +14 ´ô¹½²»ÊÇ´÷·ò 2026-04-02 14/700 2026-04-03 09:42 by À¶ÔÆË¼Óê
[¿¼ÑÐ] һ־Ըɽ¶«´óѧ»¯Ñ§Ó뻯¹¤Ñ§Ôº²ÄÁÏÓ뻯¹¤×¨Ë¶£¬360·ÖÇóµ÷¼Á +4 ²»Ô¸Í¸Â¶ÐÕÃûµÄË 2026-04-02 4/200 2026-04-03 09:29 by ÒÅÍüÏûʧµÄž™
[¿¼ÑÐ] 293Çóµ÷¼Á +4 çæçæÀÖ 2026-04-02 4/200 2026-04-02 20:10 by 6781022
[¿¼ÑÐ] 348Çóµ÷¼Á +11 zzzzyk123 2026-04-01 11/550 2026-04-02 16:52 by Wang200018
[¿¼ÑÐ] ²ÄÁÏ»¯¹¤340Çóµ÷¼Á +5 jhx777 2026-03-30 5/250 2026-04-02 12:45 by smileboy2006
[¿¼ÑÐ] ÍÁľ304Çóµ÷¼Á +6 ÍÃͻͻͻ£¬ 2026-03-31 7/350 2026-04-02 09:06 by coolminer
[¿¼ÑÐ] Ò»Ö¾Ô¸±±½»´ó²ÄÁϹ¤³Ì£¬×Ü·Ö358 +4 cs0106 2026-04-01 4/200 2026-04-02 07:42 by ÉÐË®¸óÖ÷
[¿¼ÑÐ] 085601 329·Öµ÷¼Á +6 yzsa12 2026-03-31 6/300 2026-03-31 15:23 by yanflower7133
ÐÅÏ¢Ìáʾ
ÇëÌî´¦ÀíÒâ¼û