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【转帖】研磨和抛光“Handbook of Lapping and Polishing”
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Handbook of Lapping and Polishing CRC Press edited by Ioan D. Marinescu Eckart Uhlmann Toshiro K. Doi CRC Press is an imprint of the Taylor & Francis Group, an informa business Table of Contents Chapter 1 Introduction...................................................................................................... 1 Ioan Marinescu Chapter 2 Fundamentals of Lapping................................................................................ 7 Eckart Uhlmann Chapter 3 Lapping of Ductile Materials ........................................................................ 93 Ioan Marinescu, Ion Benea, and Naga Jyothi Sanku Chapter 4 Lapping of Brittle Materials........................................................................ 123 Ioan Marinescu, Ion Benea, and Mariana Pruteanu Chapter 5 Lapping and Lapping Machines.................................................................. 265 Toshiro K. Doi and Daizo Ichikawa Chapter 6 Polishing Technology .................................................................................. 281 Toshiro K. Doi Chapter 7 Chemical Mechanical Polishing and Its Applications in ULSI Process ........................................................................................... 341 Toshiro K. Doi Index............................................................................................................ 479 download: http://www.isload.com.cn/store/yjj8yfuoc5gh4 [ Last edited by cuplgz on 2008-1-23 at 12:16 ] |
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