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[资源] 【转帖】研磨和抛光“Handbook of Lapping and Polishing”

Handbook of Lapping and Polishing

CRC Press
edited by
Ioan D. Marinescu
Eckart Uhlmann
Toshiro K. Doi
CRC Press is an imprint of the
Taylor & Francis Group, an informa business

Table of Contents
Chapter 1
Introduction...................................................................................................... 1
Ioan Marinescu
Chapter 2
Fundamentals of Lapping................................................................................ 7
Eckart Uhlmann
Chapter 3
Lapping of Ductile Materials ........................................................................ 93
Ioan Marinescu, Ion Benea, and Naga Jyothi Sanku
Chapter 4
Lapping of Brittle Materials........................................................................ 123
Ioan Marinescu, Ion Benea, and Mariana Pruteanu
Chapter 5
Lapping and Lapping Machines.................................................................. 265
Toshiro K. Doi and Daizo Ichikawa
Chapter 6
Polishing Technology .................................................................................. 281
Toshiro K. Doi
Chapter 7
Chemical Mechanical Polishing and Its Applications
in ULSI Process ........................................................................................... 341
Toshiro K. Doi
Index............................................................................................................ 479

download: http://www.isload.com.cn/store/yjj8yfuoc5gh4

[ Last edited by cuplgz on 2008-1-23 at 12:16 ]

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