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文献上的ECR也是冷等离子体。
V.P.Goretskii, A.V.Ryabtsev, I.A.Soloshenko, A.F.Tarasenko, A.I.Tschedrin的一篇文章PHYSICAL PROCESSES IN THE NEGATIVE ION SOURCE WITH REFLECTED DISCHARGE说
“that main mechanism of negative hydrogen ion formation is a dissociative attachment of electrons to oscillatory excited molecules H2:
e + H2 (v = 5 ？8) -> H- + H.
The destruction of H- ions is mainly determined by detachment under the influence of H- ion collisions with hot electrons of plasma:
e + H- ->e + e + H.
The rate of the last process drops dramatically with electron temperature decrease, this explains the presence of maximum for H— concentration in the region between discharge column and anode, where electron temperature is low.”
其他一些文献上说产生H-的关键是要有大量的cold electron，在磁控溅射中由于电子被磁场约束能量逐渐减小，还是有很大的可能性产生这样的条件的。但是看了一些文献并没有找到明确的答案，有没有条件来自己做试验搞清楚这件事情。
想知道H到底是产生正离子还是负离子也正是希望通过基片的偏压来控制其含量。
多谢wesley兄弟的积极讨论。看来坛子里搞等离子体的人还是很少。
[ Last edited by Tavano on 2008-1-11 at 17:34 ] |
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