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Thank you for submitting the above-mentioned article to Materials Science in Semiconductor Processing.

We are pleased to inform you that at this point, the scientific content requires no further revision and we are prepared to officially accept your article.

We have been able to use your submitted paper for the review process and now that the paper is going to go into production, there are a couple of small things that need to be done to ensure smooth processing of your paper through the production process.  Please check the "file inventory" to ensure that all of the items listed below are included in your manuscript.  

1) Manuscript Source Files:
We cannot accommodate PDF manuscript files for production purposes. Refer to Guide for Authors for additional information: http://www.elsevier.com/journals ... 1/guide-for-authors

2) Figure Source Files:
Please make sure that artwork files are in an acceptable format (TIFF, EPS or MS Office files) and with the correct resolution. You may include figure files embedded within the manuscript file, as long as they are of sufficient resolution for Production.
http://www.elsevier.com/artworkinstructions

When submitting your revised paper, be sure to include a separate document uploaded as "Response to Reviewers" that carefully addresses, point-by-point, the issues raised in this letter (i.e. "My paper now includes Highlights and Graphical Abstract".

Please submit your files online by logging onto the Elsevier Editorial System for Materials Science in Semiconductor Processing as an Author
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