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【答案】应助回帖
★ ★ ★ ★ ★ 柠檬树(phu_grassman代发): 金币+5, 翻译EPI+1, Thanks. 2013-09-28 08:26:23
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Physical thickness was calibrated by the deposition rate. The deposition time for the 10 nm A film, 1 nm B film and 5 nm C film were 60 s, 78 s and 67 s, respectively. |
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