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Physical thicknesses were calibrated based on deposition rates. The 10nm A film was deposited for 60 s. This 1 nm B film was deposited for 78 s， The 5 nm c film was deposited for 67 s. 怎么表达比较好啊 简洁些 [ Last edited by 柠檬树 on 2013-5-23 at 20:33 ] |
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zbj
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phu_grassman: 金币+1, thanks for your try. 2013-05-30 16:16:57
phu_grassman: 金币+1, thanks for your try. 2013-05-30 16:16:57
| Physical thicknesses were calibrated based on the deposition rates. The films A with thickness of 10 nm were deposited for 60 s. The films B with thickness of i nm, and the films C with thickness of 5 nm were deposited for 78 s and for 67 s respectively. |
2楼2013-05-23 22:22:19
phu_grassman
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