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Fundamentals of Nanoscale Film Analysis
By Terry L Alford, L.C. Feldman, James W. Mayer

Publisher:   Springer
Number Of Pages:   330
Publication Date:   2007-02-16


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1. An Overview: Concepts, Units, and the Bohr Atom ............................. 1
1.1 Introduction ..................................................................... 1
1.2 Nomenclature ................................................................... 2
1.3 Energies, Units, and Particles ................................................ 6
1.4 Particle¨CWave Duality and Lattice Spacing ............................... 8
1.5 The Bohr Model................................................................ 9
Problems.................................................................................. 10
2. Atomic Collisions and Backscattering Spectrometry ............................ 12
2.1 Introduction ..................................................................... 12
2.2 Kinematics of Elastic Collisions ............................................ 13
2.3 Rutherford Backscattering Spectrometry .................................. 16
2.4 Scattering Cross Section and Impact Parameter.......................... 17
2.5 Central Force Scattering ...................................................... 18
2.6 Scattering Cross Section: Two-Body ....................................... 21
2.7 Deviations from Rutherford Scattering at Low and High Energy..... 23
2.8 Low-Energy Ion Scattering................................................... 24
2.9 Forward Recoil Spectrometry................................................ 28
2.10 Center of Mass to Laboratory Transformation............................ 28
Problems.................................................................................. 31
3. Energy Loss of Light Ions and Backscattering Depth Profiles ................. 34
3.1 Introduction ..................................................................... 34
3.2 General Picture of Energy Loss and Units of Energy Loss............. 34
3.3 Energy Loss of MeV Light Ions in Solids ................................. 35
3.4 Energy Loss in Compounds¡ªBragg¡¯s Rule............................... 40
3.5 The Energy Width in Backscattering ....................................... 40
3.6 The Shape of the Backscattering Spectrum ............................... 43
3.7 Depth Profiles with Rutherford Scattering................................. 45
3.8 Depth Resolution and Energy-Loss Straggling ........................... 47
viii Contents
3.9 Hydrogen and Deuterium Depth Profiles .................................. 50
3.10 Ranges of H and He Ions ..................................................... 52
3.11 Sputtering and Limits to Sensitivity ........................................ 54
3.12 Summary of Scattering Relations ........................................... 55
Problems.................................................................................. 55
4. Sputter Depth Profiles and Secondary Ion Mass Spectroscopy ................ 59
4.1 Introduction ..................................................................... 59
4.2 Sputtering by Ion Bombardment¡ªGeneral Concepts................... 60
4.3 Nuclear Energy Loss .......................................................... 63
4.4 Sputtering Yield ................................................................ 67
4.5 Secondary Ion Mass Spectroscopy (SIMS)................................ 69
4.6 Secondary Neutral Mass Spectroscopy (SNMS)......................... 73
4.7 Preferential Sputtering and Depth Profiles ................................ 75
4.8 Interface Broadening and Ion Mixing ...................................... 77
4.9 Thomas¨CFermi Statistical Model of the Atom............................ 80
Problems.................................................................................. 81
5. Ion Channeling .......................................................................... 84
5.1 Introduction ..................................................................... 84
5.2 Channeling in Single Crystals ............................................... 84
5.3 Lattice Location of Impurities in Crystals ................................. 88
5.4 Channeling Flux Distributions............................................... 89
5.5 Surface Interaction via a Two-Atom Model............................... 92
5.6 The Surface Peak............................................................... 95
5.7 Substrate Shadowing: Epitaxial Au on Ag(111).......................... 97
5.8 Epitaxial Growth ............................................................... 99
5.9 Thin Film Analysis
6. Electron¨CElectron Interactions and the Depth Sensitivity of
Electron Spectroscopies ............................................................... 105

7. X-ray Diffraction........................................................................ 129
8. Electron Diffraction .................................................................... 152
9. Photon Absorption in Solids and EXAFS.......................................... 174
10. X-ray Photoelectron Spectroscopy .................................................. 11. Radiative Transitions and the Electron Microprobe..............................
12. Nonradiative Transitions and Auger Electron Spectroscopy....................
13. Nuclear Techniques: Activation Analysis and Prompt Radiation Analysis ..
14. Scanning Probe Microscopy..........................................................


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