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| In this paper, strain in GaN epitaxial layer grown by hydride vapor phase epitaxy (HVPE) had been investigated by means of high-resolution x-ray diffraction (HRXRD), Raman spectra and Photoluminescence (PL) measurements. Both the biaxial in-plane and out-of-plane strains (of the order of −10−4 and 10−4, respectively) and the hydrostatic strain component (of the order of −10−5) were extracted from HRXRD method. These values agreed well with the ones computed from the blue-shift of E2 Raman mode and the near-band-edge PL peak. The results showed that strains in GaN layer were superposed by the biaxial strain and hydrostatic strain. |
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phu_grassman: ½ð±Ò+1, thanks 2013-01-11 12:48:40
sltmac: ½ð±Ò+5 2013-03-12 13:25:39
phu_grassman: ½ð±Ò+1, thanks 2013-01-11 12:48:40
sltmac: ½ð±Ò+5 2013-03-12 13:25:39
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In this paper strain in GaN epitaxial layer grown by hydride vapor phase epitaxy (HVPE) had been investigated by means of high-resolution x-ray diffraction (HRXRD), Raman spectra and Photoluminescence (PL) measurements. Both the biaxial in-plane and out-of-plane strains (of the order of −10−4 and 10−4, respectively) and the hydrostatic strain component (of the order of −10−5) were extracted from HRXRD method. These values agreed well with the ones computed from the blue-shift of E2 Raman mode and the near-band-edge PL peak. The results showed that strains in GaN layer were superposed by the biaxial strain and hydrostatic strain. ·ÒëµÄºÜºÃ°¡£¬Ã»ÓÐʲô´íÎó¡£ÓÉÓÚרҵ²»Í¬£¬Ö»ÄܰïÄã¿´¿´»ù±¾µÄÓï·¨¡£ |
2Â¥2013-01-10 20:53:25
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phu_grassman: ½ð±Ò+1, thanks 2013-01-11 12:49:19
sltmac: ½ð±Ò+5 2013-03-12 13:25:44
phu_grassman: ½ð±Ò+1, thanks 2013-01-11 12:49:19
sltmac: ½ð±Ò+5 2013-03-12 13:25:44
| In this paper, strain in GaN epitaxial layer grown by hydride vapor phase epitaxy (HVPE) was experimentelly investigated by high-resolution x-ray diffraction (HRXRD), Raman spectra and Photoluminescence (PL) measurements. Both the biaxial in-plane and out-of-plane strains (of the order of −10−4 and 10−4, respectively) and the hydrostatic strain component (of the order of −10−5) were extracted by HRXRD method. These values agreed well with the ones computed from the blue-shift of E2 Raman mode and the near-band-edge PL peak. The results showed that strains in GaN layer were superposed by the biaxial strain and hydrostatic strain. |
3Â¥2013-01-10 21:36:53














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