Znn3bq.jpeg
²é¿´: 1696  |  »Ø¸´: 7
µ±Ç°Ö»ÏÔʾÂú×ãÖ¸¶¨Ìõ¼þµÄ»ØÌû£¬µã»÷ÕâÀï²é¿´±¾»°ÌâµÄËùÓлØÌû

guochou

Òø³æ (СÓÐÃûÆø)

[ÇóÖú] MEMS¹¤ÒÕÀàÎÄÕÂͶ¸åÇóÖú

¸÷λºÃ£¡
Òò±¾ÈËÊÇг棬ÐüÉ͵Ľð±Ò²»Ôõô¶à¡£Ï£ÍûµÃµ½´ó¼ÒµÄ°ïÖú¡£
±¾ÈËдÁËһƪÀûÓÃMEMS¹¤ÒյĹØÉî·´Ó¦Àë×Ó¿ÌÊ´¼¼Êõ¿ÌÊ´¸ßÉî¿í±ÈµÄÉî²ÛÎÄÕ¡£ÏëͶһƪӰÏìÒò×ÓÔÚ1.5-2.5µÄSCI¹úÍâÆÚ¿¯£¡ÄÄλ´óÏÀÄÜÖ¸µãÒ»ÏÂͶʲôÀàÐÍµÄÆÚ¿¯±È½ÏºÃͶ¡£Íò·Ö¸Ðл¡£ÒòΪºÜ׿±£¬ËùÒÔллÁË¡£
±¾È˵ÄÂÛÎÄÌâÄ¿´ó¸ÅÒâ˼Ϊ£ºFabrication of Ultra Trenches with High Aspect Ration based on DRIE at different etching patters ¡£

[ Last edited by avast2009 on 2012-3-17 at 12:08 ]
»Ø¸´´ËÂ¥

» ÊÕ¼±¾ÌûµÄÌÔÌûר¼­ÍƼö

ÄÉÃ××ÊÁÏ

» ²ÂÄãϲ»¶

» ±¾Ö÷ÌâÏà¹Ø¼ÛÖµÌùÍÆ¼ö£¬¶ÔÄúͬÑùÓаïÖú:

ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

syjs007

ľ³æ (ÖøÃûдÊÖ)

¡¾´ð°¸¡¿Ó¦Öú»ØÌû

¸Ðл²ÎÓ룬ӦÖúÖ¸Êý +1
¿ÉÒÔ¿´¿´×Ô¼ºµÄ²Î¿¼ÎÄÏ×¶¼¼¯ÖÐÔÚÄÇЩÔÓÖ¾£¬²é²éÓкÏÊʵÄÓ°ÏìÒò×Ó¾ÍͶͶÊÔÊÔ
4Â¥2012-04-12 09:28:49
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
²é¿´È«²¿ 8 ¸ö»Ø´ð

sesame_oil

ÈÙÓþ°æÖ÷ (ÎÄ̳¾«Ó¢)

ÓÅÐã°æÖ÷ÓÅÐã°æÖ÷

¡¾´ð°¸¡¿Ó¦Öú»ØÌû

¡ï ¡ï ¡ï ¡ï
¸Ðл²ÎÓ룬ӦÖúÖ¸Êý +1
avast2009: ½ð±Ò+1, ¹¥¹ØÌûÌØ±ð½±Àø 2012-03-24 16:59:36
guochou: ½ð±Ò+3, ¡ïÓаïÖú, Óеã°ïÖú 2012-03-25 13:10:34
Ò»°ãMEMSÁìÓò¶¼ÔÚ1.X¡£ÎÄÕºõĿÉÒÔͶӰÏìÒò×ӸߵãµÄÄÉÃ×»òÕßÎïÀíÀàÔÓÖ¾
²»ÊǸ粻Ц£¬Ò»Ð¦·Û¾Íµô
2Â¥2012-03-24 13:03:29
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

guochou

Òø³æ (СÓÐÃûÆø)

ÒýÓûØÌû:
2Â¥: Originally posted by sesame_oil at 2012-03-24 13:03:29:
Ò»°ãMEMSÁìÓò¶¼ÔÚ1.X¡£ÎÄÕºõĿÉÒÔͶӰÏìÒò×ӸߵãµÄÄÉÃ×»òÕßÎïÀíÀàÔÓÖ¾

Nanoscale Research Letters£¬MECHANICS OF MATERIALS£¬IEEE-ASME TRANSACTIONS ON MECHATRONICS£¬Functional Materials Letters£¬JOURNAL OF POWER SOURCES£¬Õ⼸¸öÆÚ¿¯Äã¾õµÃÄØ£¿ºÇºÇ£¬Ð»Ð»À²¡£
3Â¥2012-03-25 13:12:50
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

hls85915

ÈÙÓþ°æÖ÷ (ÎÄ̳¾«Ó¢)

¿ÆÑй¤¾ß°æ¡ª¡ªÉ³Ä®Ö®ºú

ÓÅÐã°æÖ÷ÓÅÐã°æÖ÷

¡¾´ð°¸¡¿Ó¦Öú»ØÌû

¡ï ¡ï ¡ï ¡ï ¡ï
¸Ðл²ÎÓ룬ӦÖúÖ¸Êý +1
guochou: ½ð±Ò+5, ¡ïÓаïÖú 2012-04-13 17:24:55
0960-1317 JOURNAL OF MICROMECHANICS AND MICROENGINEERING  6 1176
1000-6818 ACTA PHYSICO-CHIMICA SINICA  18 2763
1674-7321 SCIENCE CHINA-TECHNOLOGICAL SCIENCES
¹þ¹þ
5Â¥2012-04-12 10:06:25
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
×î¾ßÈËÆøÈÈÌûÍÆ¼ö [²é¿´È«²¿] ×÷Õß »Ø/¿´ ×îºó·¢±í
[¿¼ÑÐ] 26×ÔÈ»µØÀíѧ303·ÖÇóµ÷¼Á +6 Ò»Õ½³É˶°¡°¡°¡° 2026-04-06 11/550 2026-04-11 21:27 by Åáºêΰ
[¿¼ÑÐ] 303Çóµ÷¼Á +14 SereinQ 2026-04-10 15/750 2026-04-11 20:43 by À¶ÔÆË¼Óê
[¿¼ÑÐ] 284Çóµ÷¼Á +11 archer.. 2026-04-09 12/600 2026-04-11 20:23 by À¶ÔÆË¼Óê
[¿¼ÑÐ] 366Çóµ÷¼Á +7 ²»ÖªÃûµÄСئ 2026-04-11 7/350 2026-04-11 16:45 by PeggyPeng17
[¿¼ÑÐ] Çóµ÷¼Á +13 ÕÅ·¬ÇѲ»³´µ° 2026-04-10 14/700 2026-04-11 16:02 by vgtyfty
[¿¼ÑÐ] 085600²ÄÁÏÓ뻯¹¤329·ÖÇóµ÷¼Á +16 Ò¶zilin 2026-04-10 16/800 2026-04-11 11:04 by may_ÐÂÓî
[¿¼ÑÐ] 22408 352·ÖÇóµ÷¼Á +4 ŬÁ¦µÄÏÄÄ© 2026-04-09 4/200 2026-04-11 10:42 by maddjdld
[¿¼ÑÐ] 283Çóµ÷¼Á£¬¹¤¿Æ£¡ +12 ËÕ´òË®7777 2026-04-08 12/600 2026-04-11 10:28 by ÄæË®³Ë·ç
[¿¼ÑÐ] ²ÄÁÏÓ뻯¹¤µ÷¼Á +12 ·ñ¼«Ì©À´2026 2026-04-10 13/650 2026-04-11 00:28 by wangjihu
[¿¼ÑÐ] 314Çóµ÷¼Á +18 xhhdjdjsjks 2026-04-09 19/950 2026-04-10 18:53 by HPUCZ
[¿¼ÑÐ] Ò»Ö¾Ô¸¾©Çø985£¬085401£¬Óë±¾¿Æ×¨ÒµÒ»Ö£¬µç×ÓÐÅÏ¢¹¤³Ì£¬ +4 Ñô¹â¿ªÀʵÄÄк¢ 2026-04-10 4/200 2026-04-10 18:27 by shenrf
[¿¼ÑÐ] ±¾¿ÆÎ÷¹¤´ó 0856 324Çóµ÷¼Á +10 wysyjs25 2026-04-09 11/550 2026-04-10 08:37 by 5268321
[¿¼ÑÐ] 085600²ÄÁÏÓ뻯¹¤£¬Çóµ÷¼Á +11 won_qii 2026-04-07 11/550 2026-04-09 17:03 by luoyongfeng
[¿¼ÑÐ] Ò»Ö¾Ô¸985³õÊÔ354·ÖÉúÎïµ÷¼Á +3 031001 2026-04-06 3/150 2026-04-09 00:30 by Evan_Liu
[¿¼ÑÐ] ר˶0854³õÊÔ¿¼²Ä¿Æ»ù£¬Çóµ÷¼Á +7 3220548044 2026-04-06 10/500 2026-04-08 21:59 by hypershenger
[¿¼ÑÐ] 263·ÖBÇøÇóµ÷¼Á +6 Àînihao 2026-04-08 6/300 2026-04-08 09:38 by ÄÏ¿ªÐ¡ôë
[¿¼ÑÐ] Çóµ÷¼Á +11 wwwwabcde 2026-04-07 11/550 2026-04-07 23:16 by JourneyLucky
[¿¼ÑÐ] 319·Ö085702°²È«¹¤³ÌÇóµ÷¼Á +6 rious 2026-04-05 6/300 2026-04-07 09:42 by jp9609
[¿¼ÑÐ] 307Çóµ÷¼Á +3 ËùÄî¼°ËùÍû 2026-04-06 3/150 2026-04-06 17:30 by ÍÁľ˶ʿÕÐÉú
[¿¼ÑÐ] 085405Èí¼þ¹¤³Ì301·ÖÇóµ÷¼Á£¬×¨Ë¶¿É¿çרҵ£¬ËÄÁù¼¶Òѹý +3 ¾²¾²ÏëÏë 2026-04-05 3/150 2026-04-06 15:23 by nepu_uu
ÐÅÏ¢Ìáʾ
ÇëÌî´¦ÀíÒâ¼û