| 查看: 299 | 回复: 5 | ||
| 【奖励】 本帖被评价3次，作者zhangjs增加金币 2.5 个 | ||
| 当前主题已经存档。 | ||
[资源]
Fundamentals of Semiconductor Manufacturing and Process Control
|
||
|
Fundamentals of Semiconductor Manufacturing and Process Control 重贴，原帖已失效。。。。。 Book Description: A practical guide to semiconductor manufacturing from process control to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts. Following an overview of manufacturing and technology, the text explores process monitoring methods, including those that focus on product wafers and those that focus on the equipment used to produce wafers. Next, the text sets forth some fundamentals of statistics and yield modeling, which set the foundation for a detailed discussion of how statistical process control is used to analyze quality and improve yields. The discussion of statistical experimental design offers readers a powerful approach for systematically varying controllable process conditions and determining their impact on output parameters that measure quality. The authors introduce process modeling concepts, including several advanced process control topics such as run-by-run, supervisory control, and process and equipment diagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and management of overall manufacturing systems * Chapters include case studies, sample problems, and suggested exercises * Instructor support includes electronic copies of the figures and an instructor's manual Graduate-level students and industrial practitioners will benefit from the detailed exami?nation of how electronic materials and supplies are converted into finished integrated circuits and electronic products in a high-volume manufacturing environment. [ Last edited by imrking on 2007-3-25 at 09:37 ] |
回复此楼» 猜你喜欢
食品与营养（0955）271求调剂
已经有13人回复
-
转长聘了
已经有5人回复
-
药学305求调剂
已经有4人回复
-
生物学调剂
已经有5人回复
-
26药学专硕105500求调剂
已经有5人回复
-
085408光电信息工程专硕355一志愿长春光机所调剂
已经有6人回复
-
山东省基金2026
已经有7人回复
-
297，工科调剂?河南农业大学本科
已经有3人回复
-
290求调剂
已经有19人回复
-
245求调剂
已经有8人回复
2楼2007-02-28 12:34:33
4楼2011-08-27 21:49:15
简单回复
yeshh3楼
2011-08-27 21:48
回复
五星好评 顶一下，感谢分享！
5