| 查看: 302 | 回复: 5 | |||
| 【奖励】 本帖被评价3次，作者zhangjs增加金币 2.5 个 | |||
| 当前主题已经存档。 | |||
[资源]
Fundamentals of Semiconductor Manufacturing and Process Control
|
|||
|
Fundamentals of Semiconductor Manufacturing and Process Control 重贴，原帖已失效。。。。。 Book Description: A practical guide to semiconductor manufacturing from process control to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts. Following an overview of manufacturing and technology, the text explores process monitoring methods, including those that focus on product wafers and those that focus on the equipment used to produce wafers. Next, the text sets forth some fundamentals of statistics and yield modeling, which set the foundation for a detailed discussion of how statistical process control is used to analyze quality and improve yields. The discussion of statistical experimental design offers readers a powerful approach for systematically varying controllable process conditions and determining their impact on output parameters that measure quality. The authors introduce process modeling concepts, including several advanced process control topics such as run-by-run, supervisory control, and process and equipment diagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and management of overall manufacturing systems * Chapters include case studies, sample problems, and suggested exercises * Instructor support includes electronic copies of the figures and an instructor's manual Graduate-level students and industrial practitioners will benefit from the detailed exami?nation of how electronic materials and supplies are converted into finished integrated circuits and electronic products in a high-volume manufacturing environment. [ Last edited by imrking on 2007-3-25 at 09:37 ] |
回复此楼» 猜你喜欢
国自然面上和省基金B类撒花
已经有14人回复
-
有没有学校收留
已经有3人回复
-
312求调剂
已经有3人回复
-
华师大读博
已经有5人回复
-
又一批高校组建人工智能学院 师资行吗 不是骗人吗
已经有5人回复
-
急需审稿人！！！
已经有3人回复
-
申博/考博
已经有8人回复
-
295分求调剂
已经有6人回复
-
一志愿中科大材料与化工，353分还有调剂学校吗
已经有13人回复
-
085600材料与化工调剂
已经有6人回复
2楼2007-02-28 12:34:33
4楼2011-08-27 21:49:15
简单回复
yeshh3楼
2011-08-27 21:48
回复
五星好评 顶一下，感谢分享！
5