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single layer graphene flakes were transferred to the surface of an oxidized Si substrate using mechanical exfoliation,source/drain contacts were then defined by electron beam lithography (EBL) followed by Cr/Au/Cr metallization, and then the contacts were passivated using SiO2.SiNW-FETs were defined close to Gra-FET devices in a second round of fabrication. Specifically, 30 nm diameter p-type SiNWs were deposited from ethanol solution onto the chip with Gra-FET devices, and then EBL and metallization steps were carried out to define source/drain electrodes.Last, the substrate chip was coated with a poly(methyl methacrylate) passiva-tion layer, and 50 µm ¡Á 50 µm windows were defined to expose the Gra- and NW-FET devices. Gra- and SiNW-FET device chips were interfaced with embryonic chicken cardiomyocytes as shown schematically in Figure 1B. Nanodevice cardiomyocyte interfaces weremade in a flexiblemanner using our recently reported scheme: First,embryonic chicken cardiomyocytes were cultured under optimized conditions on thin poly(dimethylsiloxane) (PDMS)
sheets;second, a PDMS/cardiomyocyte substrate was transferred into a well, which contains extracellular medium, over the Gra-FET and SiNW-FET chip; third, the PDMS/cardiomyocyte cell substrates were positioned using a x-y-z manipulator under an optical microscope to bring spontaneously beating cells into direct contact with devices (Figure 1B).
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