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[ÇóÖú] ÔõÑùÄÜÖ»etch SiO2¶ø²»etch Ti

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lchpy(½ð±Ò+1): thanks for your information 2011-12-13 18:22:23
If possible, I recommend you try the method of plasma etch using CHF3,which maybe help etch SiO2 instead of Ti.
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