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wiley ebook: Nanoscale Calibration Standards and Methods-2005
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ISBN: 352740502 ATitle: Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro- and Nanometer Range Author: Günter Wilkening, Ludger Koenders Publisher: Wiley-VCH (August 19, 2005) Publication Date: 2005-08-19 Number Of Pages: 541 Editorial Description The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods The contents 1 INSTRUMENTATION Long-range Scanning Probe Microscope Development of SPM and Sensors 2 CALIBRATIONZ9G Standards for Nanometrology Optical Methods 3 APPLICATION Lateral Structures Surfaces Material Properties downloadlink: http://rapidshare.com/files/7235 ... rds_and_Methods.rar[/url] [ Last edited by dgf2008 on 2008-10-13 at 18:40 ] |
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