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[×ÊÔ´] wiley ebook: Nanoscale Calibration Standards and Methods-2005

ISBN: 352740502
ATitle: Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro- and Nanometer Range
Author: G¨¹nter Wilkening, Ludger Koenders
Publisher: Wiley-VCH (August 19, 2005)
Publication Date: 2005-08-19
Number Of Pages: 541

Editorial Description
The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods

The contents
1 INSTRUMENTATION
Long-range Scanning Probe Microscope
Development of SPM and Sensors
2 CALIBRATIONZ9G
Standards for Nanometrology
Optical Methods
3 APPLICATION
Lateral Structures
Surfaces
Material Properties

downloadlink:
http://rapidshare.com/files/7235 ... rds_and_Methods.rar[/url]

[ Last edited by dgf2008 on 2008-10-13 at 18:40 ]
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