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汕头大学海洋科学接受调剂
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【奖励】 本帖被评价5次,作者crisoo增加金币 4.5
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crisoo

铁杆木虫 (著名写手)


[资源] 【Ebook】 X-Ray Metrology in Semiconductor Manufacturing

Book Properties
ISBN: 0849339286
Title: X-Ray Metrology in Semiconductor Manufacturing
Author: D. Keith Bowen Brian K. Tanner
Publisher: CRC
Publication Date: 2006-01-24
Number Of Pages: 296


Book Description

Written by established world experts, X-Ray Metrology in Semiconductor Manufacturing describes the applications, science, and technology of this rapidly evolving area. This book emphasizes practical metrology, with real world examples from the semiconductor and magnetics industries. The authors discuss the techniques, theory, and applications of X-ray metrology in semiconductors and other advanced thin films. The book covers the essential metrological questions of precision and repeatability, absolute accuracy, spot size, and throughput for each type of measurement. This text contains important information for electrical engineers, fabrication engineers, and semiconductor engineers.

[ Last edited by luo.henry on 2008-4-10 at 14:17 ]
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lotr

铜虫 (初入文坛)


★★★★★ 五星级,优秀推荐

Great book. Thanks !
3楼2006-11-18 16:15:41
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shuaidream


it is useful~!
5楼2006-11-29 12:57:16
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hzhatuk

银虫 (小有名气)


★★★★★ 五星级,优秀推荐

好书!
6楼2006-11-29 18:37:56
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yangtianpeng

至尊木虫 (知名作家)


★★★★★ 五星级,优秀推荐

很好!
7楼2006-11-29 20:02:30
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简单回复
2006-11-18 15:40   回复  
 
zhangjs4楼
2006-11-19 10:34   回复  
thx
2006-12-15 17:33   回复  
 
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