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[资源]
【Ebook】 X-Ray Metrology in Semiconductor Manufacturing
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Book Properties ISBN: 0849339286 Title: X-Ray Metrology in Semiconductor Manufacturing Author: D. Keith Bowen Brian K. Tanner Publisher: CRC Publication Date: 2006-01-24 Number Of Pages: 296 Book Description Written by established world experts, X-Ray Metrology in Semiconductor Manufacturing describes the applications, science, and technology of this rapidly evolving area. This book emphasizes practical metrology, with real world examples from the semiconductor and magnetics industries. The authors discuss the techniques, theory, and applications of X-ray metrology in semiconductors and other advanced thin films. The book covers the essential metrological questions of precision and repeatability, absolute accuracy, spot size, and throughput for each type of measurement. This text contains important information for electrical engineers, fabrication engineers, and semiconductor engineers. [ Last edited by luo.henry on 2008-4-10 at 14:17 ] |
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