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【学术求助】椭圆光度计原理求教!
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偶遇 椭圆 光学光度Sample Text计可测薄膜厚度,但不知道其原理,请赐教,谢谢!![]() [ Last edited by mainpro on 2006-10-16 at 23:31 ] |
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The Ellipsometer, an Apparatus to Measure Thicknesses of Thin Surface Films Alexandre Rothen Laboratories of The Rockefeller Institute for Medical Research, New York, New York Review of Scientific Instruments -- February 1945 -- Volume 16, Issue 2, pp. 26-30 An apparatus designed to determine the thickness of films deposited on metal slides is described. It is based on the measurement of the change that takes place in ellipticity of the light reflected after a slide has been coated with the film under investigation. The apparatus is capable of measuring a film thickness within ±0.3A, a sensitivity at least ten times greater than that obtained with the method based on light interference. Review of Scientific Instruments is copyrighted by The American Institute of Physics. http://scitation.aip.org/getabs/ ... =cvips&gifs=yes |
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