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yt.yutian.½ð³æ (СÓÐÃûÆø)
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½âÊÍ2¸öµ¥´Ê£¨¼ÓÏ»®Ïߵģ©a taped Mylar maskµÈ
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Inspection of Microdevices. We measure the critical PDMS channel dimensions by filling the channels with fluorescine dye and recording images using epifluorescence microscopy. A fluorescent micrograph of a device is shown in Figure 2a. Here we show the pinched section for a designed pinched width of 20 ¨ªm fabricated with a taped Mylar mask, an untaped Mylar mask, and the glass mask. The measured device dimensions vary from the design values as shown in Table 1 because the actual device is larger than designed due to limited mask-wafer contact during photolithography |
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zerohead
½û³æ (Ö°Òµ×÷¼Ò)
- ·ÒëEPI: 466
- Ó¦Öú: 1 (Ó×¶ùÔ°)
- ¹ó±ö: 0.301
- ½ð±Ò: 8727.8
- É¢½ð: 850
- ºì»¨: 15
- ɳ·¢: 10
- Ìû×Ó: 3768
- ÔÚÏß: 471.7Сʱ
- ³æºÅ: 1041741
- ×¢²á: 2010-06-14
- ÐÔ±ð: GG
- רҵ: Â߼ѧ
4Â¥2011-06-14 15:27:22
zerohead
½û³æ (Ö°Òµ×÷¼Ò)
- ·ÒëEPI: 466
- Ó¦Öú: 1 (Ó×¶ùÔ°)
- ¹ó±ö: 0.301
- ½ð±Ò: 8727.8
- É¢½ð: 850
- ºì»¨: 15
- ɳ·¢: 10
- Ìû×Ó: 3768
- ÔÚÏß: 471.7Сʱ
- ³æºÅ: 1041741
- ×¢²á: 2010-06-14
- ÐÔ±ð: GG
- רҵ: Â߼ѧ
¡ï
sltmac(½ð±Ò+1): лл½»Á÷~~ 2011-06-14 11:58:16
yt.yutian.(½ð±Ò+1, ·ÒëEPI+1): ·Òëa taped Õû¸öºÃÂð£¿Mylar mask´ÊÊǾÛõ¥ÑÚĤ£¬»¹ÓÐÕâ¸ö pinched section Ôõô·ÒëÄØ£¿ÊÇÄó½ÚÂð 2011-06-14 14:56:46
Mally89(·ÒëEPI-1): Ó¦LzÒªÇ󣬽«EPI·¢·ÅÓÚ6Â¥¡ 2011-06-18 16:07:38
sltmac(½ð±Ò+1): лл½»Á÷~~ 2011-06-14 11:58:16
yt.yutian.(½ð±Ò+1, ·ÒëEPI+1): ·Òëa taped Õû¸öºÃÂð£¿Mylar mask´ÊÊǾÛõ¥ÑÚĤ£¬»¹ÓÐÕâ¸ö pinched section Ôõô·ÒëÄØ£¿ÊÇÄó½ÚÂð 2011-06-14 14:56:46
Mally89(·ÒëEPI-1): Ó¦LzÒªÇ󣬽«EPI·¢·ÅÓÚ6Â¥¡ 2011-06-18 16:07:38
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Mylar mask £¾Ûõ¥±¡Ä¤ Mylar ÊÇÒ»ÖÖ¾Ûõ¥Àà¸ß·Ö×ÓÎïµÄÉÌÆ·Ãû |
2Â¥2011-06-14 11:56:46
zerohead
½û³æ (Ö°Òµ×÷¼Ò)
- ·ÒëEPI: 466
- Ó¦Öú: 1 (Ó×¶ùÔ°)
- ¹ó±ö: 0.301
- ½ð±Ò: 8727.8
- É¢½ð: 850
- ºì»¨: 15
- ɳ·¢: 10
- Ìû×Ó: 3768
- ÔÚÏß: 471.7Сʱ
- ³æºÅ: 1041741
- ×¢²á: 2010-06-14
- ÐÔ±ð: GG
- רҵ: Â߼ѧ
3Â¥2011-06-14 15:24:42
zerohead
½û³æ (Ö°Òµ×÷¼Ò)
- ·ÒëEPI: 466
- Ó¦Öú: 1 (Ó×¶ùÔ°)
- ¹ó±ö: 0.301
- ½ð±Ò: 8727.8
- É¢½ð: 850
- ºì»¨: 15
- ɳ·¢: 10
- Ìû×Ó: 3768
- ÔÚÏß: 471.7Сʱ
- ³æºÅ: 1041741
- ×¢²á: 2010-06-14
- ÐÔ±ð: GG
- רҵ: Â߼ѧ
5Â¥2011-06-14 15:32:21









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