| ²é¿´: 1395 | »Ø¸´: 5 | ||
| ±¾Ìû²úÉú 1 ¸ö ·ÒëEPI £¬µã»÷ÕâÀï½øÐв鿴 | ||
| µ±Ç°Ö»ÏÔʾÂú×ãÖ¸¶¨Ìõ¼þµÄ»ØÌû£¬µã»÷ÕâÀï²é¿´±¾»°ÌâµÄËùÓлØÌû | ||
yt.yutian.½ð³æ (СÓÐÃûÆø)
|
[ÇóÖú]
½âÊÍ2¸öµ¥´Ê£¨¼ÓÏ»®Ïߵģ©a taped Mylar maskµÈ
|
|
|
Inspection of Microdevices. We measure the critical PDMS channel dimensions by filling the channels with fluorescine dye and recording images using epifluorescence microscopy. A fluorescent micrograph of a device is shown in Figure 2a. Here we show the pinched section for a designed pinched width of 20 ¨ªm fabricated with a taped Mylar mask, an untaped Mylar mask, and the glass mask. The measured device dimensions vary from the design values as shown in Table 1 because the actual device is larger than designed due to limited mask-wafer contact during photolithography |
» ²ÂÄãϲ»¶
274Çóµ÷¼Á
ÒѾÓÐ4È˻ظ´
328Çóµ÷¼Á£¬Ó¢ÓïÁù¼¶551£¬ÓпÆÑоÀú
ÒѾÓÐ10È˻ظ´
328Çóµ÷¼Á£¬Ó¢ÓïÁù¼¶551£¬ÓпÆÑоÀú
ÒѾÓÐ7È˻ظ´
²ÄÁÏרҵÇóµ÷¼Á
ÒѾÓÐ5È˻ظ´
Ò»Ö¾Ô¸Ìì½ò´óѧ»¯Ñ§¹¤ÒÕרҵ£¨081702£©315·ÖÇóµ÷¼Á
ÒѾÓÐ10È˻ظ´
344Çóµ÷¼Á
ÒѾÓÐ7È˻ظ´
Ò»Ö¾Ô¸985£¬±¾¿Æ211£¬0817»¯Ñ§¹¤³ÌÓë¼¼Êõ319Çóµ÷¼Á
ÒѾÓÐ7È˻ظ´
271²ÄÁϹ¤³ÌÇóµ÷¼Á
ÒѾÓÐ4È˻ظ´
²ÄÁÏר˶ӢһÊý¶þ306
ÒѾÓÐ4È˻ظ´
294Çóµ÷¼Á²ÄÁÏÓ뻯¹¤×¨Ë¶
ÒѾÓÐ4È˻ظ´
zerohead
½û³æ (Ö°Òµ×÷¼Ò)
- ·ÒëEPI: 466
- Ó¦Öú: 1 (Ó×¶ùÔ°)
- ¹ó±ö: 0.301
- ½ð±Ò: 8727.8
- É¢½ð: 850
- ºì»¨: 15
- ɳ·¢: 10
- Ìû×Ó: 3768
- ÔÚÏß: 471.7Сʱ
- ³æºÅ: 1041741
- ×¢²á: 2010-06-14
- ÐÔ±ð: GG
- רҵ: Â߼ѧ
3Â¥2011-06-14 15:24:42
zerohead
½û³æ (Ö°Òµ×÷¼Ò)
- ·ÒëEPI: 466
- Ó¦Öú: 1 (Ó×¶ùÔ°)
- ¹ó±ö: 0.301
- ½ð±Ò: 8727.8
- É¢½ð: 850
- ºì»¨: 15
- ɳ·¢: 10
- Ìû×Ó: 3768
- ÔÚÏß: 471.7Сʱ
- ³æºÅ: 1041741
- ×¢²á: 2010-06-14
- ÐÔ±ð: GG
- רҵ: Â߼ѧ
¡ï
sltmac(½ð±Ò+1): лл½»Á÷~~ 2011-06-14 11:58:16
yt.yutian.(½ð±Ò+1, ·ÒëEPI+1): ·Òëa taped Õû¸öºÃÂð£¿Mylar mask´ÊÊǾÛõ¥ÑÚĤ£¬»¹ÓÐÕâ¸ö pinched section Ôõô·ÒëÄØ£¿ÊÇÄó½ÚÂð 2011-06-14 14:56:46
Mally89(·ÒëEPI-1): Ó¦LzÒªÇ󣬽«EPI·¢·ÅÓÚ6Â¥¡ 2011-06-18 16:07:38
sltmac(½ð±Ò+1): лл½»Á÷~~ 2011-06-14 11:58:16
yt.yutian.(½ð±Ò+1, ·ÒëEPI+1): ·Òëa taped Õû¸öºÃÂð£¿Mylar mask´ÊÊǾÛõ¥ÑÚĤ£¬»¹ÓÐÕâ¸ö pinched section Ôõô·ÒëÄØ£¿ÊÇÄó½ÚÂð 2011-06-14 14:56:46
Mally89(·ÒëEPI-1): Ó¦LzÒªÇ󣬽«EPI·¢·ÅÓÚ6Â¥¡ 2011-06-18 16:07:38
|
Mylar mask £¾Ûõ¥±¡Ä¤ Mylar ÊÇÒ»ÖÖ¾Ûõ¥Àà¸ß·Ö×ÓÎïµÄÉÌÆ·Ãû |
2Â¥2011-06-14 11:56:46
zerohead
½û³æ (Ö°Òµ×÷¼Ò)
- ·ÒëEPI: 466
- Ó¦Öú: 1 (Ó×¶ùÔ°)
- ¹ó±ö: 0.301
- ½ð±Ò: 8727.8
- É¢½ð: 850
- ºì»¨: 15
- ɳ·¢: 10
- Ìû×Ó: 3768
- ÔÚÏß: 471.7Сʱ
- ³æºÅ: 1041741
- ×¢²á: 2010-06-14
- ÐÔ±ð: GG
- רҵ: Â߼ѧ
4Â¥2011-06-14 15:27:22
zerohead
½û³æ (Ö°Òµ×÷¼Ò)
- ·ÒëEPI: 466
- Ó¦Öú: 1 (Ó×¶ùÔ°)
- ¹ó±ö: 0.301
- ½ð±Ò: 8727.8
- É¢½ð: 850
- ºì»¨: 15
- ɳ·¢: 10
- Ìû×Ó: 3768
- ÔÚÏß: 471.7Сʱ
- ³æºÅ: 1041741
- ×¢²á: 2010-06-14
- ÐÔ±ð: GG
- רҵ: Â߼ѧ
5Â¥2011-06-14 15:32:21













»Ø¸´´ËÂ¥